Chung Shan Institute of Science and Technology

Chung-shan Institute of Science and Technology, Armaments Bureau, M.n.d

Hong-Chyi Lee

Joseph D S Deng

A flexible probe, applicable for measuring signals from the object with an uneven surface, includes at least a probe tip, a flexible multi-layered dielectric substrate, a planar transmission structure and a coaxial transmission structure. The probe tip is connected to the planar transmission structure and extends beyond the flexible dielectric substrate. The planar transmission structure is attached to and supported by the flexible dielectric substrate and then connected to the coaxial transmission structure.

Flexible multi-layered probe for measuring a signal from an object

A resilient and rugged probe, used to measure an on-wafer signal. The probe has a metal probe tip, a resilient soft multi-layered dielectric substrate, a planar transmission structure and a fixed end. The probe tip is connected to the planar transmission structure. The planar transmission structure is attached to and supported by the resilient soft multi-layered dielectric substrate and then connected to the fixed end.

Growing community of inventors

Taoyuan, Taiwan

Hong-Chyi Lee