Agency for Science, Technology and Research

Nanyang Technological University

Hong Cai

Jifang Tao

Alex Yuandong Gu

Julius Ming-Lin Tsai

Junfeng Song

Lennon Yao Ting Lee

Yuandong Alex Gu

Guoqiang Wu

Alex Yuan-dong Gu

Hyun Kee Chang

Aiqun Liu

Various embodiments may relate a chemical sensor. The chemical sensor may include a substrate including a first sealed (or isolated) cavity and a second sealed (or isolated) cavity separate from the first sealed (or isolated) cavity. The chemical sensor may also include an emitter in the first sealed (or isolated) cavity, the emitter configured to emit infrared light. The chemical sensor may further include a detector in the second sealed (or isolated) cavity. The chemical sensor may also include a waveguide configured to carry the infrared light from the emitter to the detector. The waveguide may include a sensing portion configured such that a property of the infrared light carried through the sensing portion changes in response to a chemical entity in contact with the sensing portion. The detector may be configured to detect the change in the property (of the infrared light).

Chemical sensor and method of forming the same

According to various embodiments, there is provided a sensor arrangement including a filter configured to provide an output signal having an output wavelength, the output wavelength having a dependence on a temperature of the filter; a temperature module configured to change the temperature of the filter; a controller circuit configured to control the temperature module for changing the temperature of the filter until the output wavelength increases with decreasing temperature; and a determination circuit configured to determine a dew point of an environment surrounding the sensor arrangement, based on a minimum value of the output wavelength and the dependence.

Sensor arrangements and methods of operating a sensor arrangement

There is provided an optical waveguide structure, including a substrate, an insulating layer disposed on the substrate whereby the insulating layer includes an air slot formed therein, a first material layer suspended over the air slot whereby the first material layer constitutes a waveguide core of the optical waveguide structure, and a second material layer disposed over the waveguide core whereby the waveguide core is suspended over the air slot by the second material layer. There is also provided an optical gas sensor incorporating the optical waveguide structure and methods of fabrication thereof.

Optical waveguide structure and optical gas sensor, and methods of fabrication thereof

Various aspects of this disclosure provide a bolometer including a substrate and a ring resonator structure over the substrate. The bolometer may also include a silicon oxide layer in thermal contact with the ring resonator structure. The bolometer may further include a first waveguide over the substrate and coupled to the ring resonator structure, the first waveguide configured to couple an infrared light to the ring resonator structure so that the infrared light generates a temperature increase in the silicon oxide layer. The bolometer may additionally include a second waveguide over the substrate and coupled to the ring resonator structure, the second waveguide configured to couple a probe light input to the ring resonator structure so that a probe light output is generated from the probe light input, the probe light output having a change in a characteristic from the probe light input based on the temperature increase.

Bolometer, method of fabricating the same, and bolometric method

A micro-machined optical pressure sensor, comprising: a diaphragm configured to deform when a force is applied thereto; and a sensing micro-ring spaced apart from the diaphragm by a gap, the gap being variable depending on the force applied on the diaphragm, wherein the sensing micro-ring is configured to produce a resonance wavelength shift when the gap is varied, the resonance wavelength shift indicative of the force applied to the diaphragm.

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Singapore, Singapore

Hong Cai