W.c. Heraeus Gmbh & Co Kg

W.c. Heraeus Gmbh

Holger Zingg

David Francis Lupton

Harald Manhardt

Albrecht Bischoff

Bernd Stenger

Ralf Heck

Friedhold Sch&ouml;lz

J&ouml;rg Schielke

Peter Mainz

Egon Maier

Rainer J&uuml;ttner

Lutz Schraepler

A process for producing a tube target for cathode sputtering plants, in which the tube target is formed from a metallic inner tube (target holder) made of a first material with a first melting point of T &gE;900 K and a metallic outer tube (target) that concentrically surrounds the inner tube and that is made of a second material with a second melting point of T &lE;800 K. The inside diameter of the outer tube and the outside diameter of the inner tube are proportioned in such a way that the two tubes fit together tightly and are mechanically firmly joined. The outer tube is formed by casting the second material in a molten state in a heated, vertical, cylindrical permanent mold, which has a heated mandrel that constitutes the inner tube. After a space between the mold and the inner tube has been filled with the molten second material, a first thermal gradient develops between the inner tube and the mold, a second thermal gradient develops between the bottom and the top of the mold, and the outer tube is simultaneously cooled from the inside to the outside and from the bottom to the top.

Process for producing a tube-shaped cathode sputtering target

An SiO -glass bulb with at least one current lead-in made of a gas-tight composite material, such that the composite material consists of a noble metal with a melting point >1,700&deg; C. and SiO and is at least partially coated with a layer of SiO . The noble metal and the SiO are homogeneously distributed in the composite material. The noble metal content of the composite material is &gE;10 vol. % to &lE;50 vol. %, and the SiO coating covers the composite material at least in the region of the connection with the SiO -glass bulb.

SiO2-glass bulb with at least one current lead-in, process for producing a gas-tight connection between them, and their use in a gas-discharge lamp

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Biebergemünd, Germany

Holger Zingg