Robert Boschgmbh

Acandis Gmbh & Co. Kg

Holger Rumpf

Jochen Reinmuth

Johannes Classen

Jens Frey

Torsten Ohms

Lars Tebje

Eckhard Graf

Achim Breitling

Eckhard Quandt

Christof Schwenk

Christiane Zamponi

Joerg Braeuer

Kurt-Ulrich Ritzau

Michael Koch

A micromechanical system which includes a movably suspended mass. The micromechanical system includes a damping system, the damping system including a movably suspended damping structure, the damping structure being deflectable by applying a voltage. The damping structure is designed in such a way that a frequency response and/or a damping of the movably suspended mass are/is changeable with the aid of a deflection of the damping structure.

Micromechanical system, method for operating a micromechanical system

A micromechanical device that includes a silicon substrate with an overlying oxide layer and with a micromechanical functional layer lying above same, which extend in parallel to a main extension plane, a cavity being formed at least in the micromechanical functional layer and in the oxide layer. An access channel is formed in the oxide layer and/or in the micromechanical functional layer which, starting from the cavity, extends in parallel to the main extension plane and in the process extends in a projection direction, as viewed perpendicularly to the main extension plane, all the way into an access area outside the cavity. A method for manufacturing a micromechanical device is also described.

Micromechanical device and method for manufacturing a micromechanical device

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Reutlingen, Germany

Holger Rumpf