Carl Zeiss Laser Optics Gmbh

Carl Zeiss Smt Gmbh

Tooz Technologies Gmbh

Cymer, Inc.

Carl-zeiss-smt Ag

Carl Zeiss Ag

Holger Muenz

Alois Herkommer

Michel Le Maire

Willi Anderl

Vitaliy Shklover

Markus Bauer

Johannes Kraus

Ulrich Weber

Ulrich Bingel

Wilhelm Egle

Jeffrey Erxmeyer

Rafael Egger

Bernhard Weigl

Michael Schall

Thomas Neidhardt

Ingrid Schuster

Wolfgang Hafner

Wolfgang Singer

Alexander Epple

Palash P Das

Hans-Juergen Dobschal

Hans-Juergen Rostalski

Christoph Menke

David S Knowles

Matthias Hillenbrand

Holger Kierey

Norbert Kerwien

Artur Degen

Martin Voelcker

Christian Hoess

Albert P Cefalo

Wolfgang Seifert

Horst Schade

Hans Jürgen Rostalski

Matthias Krantz

Arvind Shah

An optical system for transmitting a source image includes a light guide, which defines a light transmission channel, an optical coupling arrangement and an optical decoupling arrangement, the coupling arrangement being designed to couple light emerging from the source image into the light guide arrangement in such a way that the light can propagate in the light guide arrangement by total reflection, and the decoupling arrangement being designed to decouple light that has propagated in the light guide arrangement from the light guide arrangement. The light guide arrangement comprises an optical deflection device, which, as viewed in the direction of propagation of the light in the light guide arrangement, is arranged between the coupling arrangement and the decoupling arrangement and is designed to deflect light ray bundles, emerging from the coupling arrangement at different beam angles and impinging divergently on the deflection device, in bundled manner towards the decoupling arrangement.

Optical system for transmitting a source image

A projection optical unit for microlithography includes a plurality of mirrors and has a numerical aperture having a value larger than 0.5. The plurality of mirrors includes at least three grazing incidence mirrors, which deflect a chief ray of a central object field point with an angle of incidence of greater than 45&#xb0;. Different polarized light beams passing the projection optical unit are rotated in their polarization direction by different angles of rotation. The projection optical unit includes first and second groups of mirrors. The second group of mirrors includes the final two mirrors of the plurality of mirrors at the image side. A linear portion in the pupil dependence of the total geometrical polarization rotation of the projection optical unit is less than 20% of a linear portion in the pupil dependence of the geometrical polarization rotation of the second group of mirrors.

Projection optical unit for microlithography and method for producing a structured component

A method for supporting a user aiming at an object with a telescope includes determining and storing a first object position of the object relative to the telescope when a user aims at the object with the telescope and the telescope is located at a first telescope position, and supporting a user when aiming at the object again with the same telescope based on the stored first object position relative to the telescope.

Method for supporting a user aiming at an object with a telescope

A curved light guide can be used as an imaging optical unit or as part of an imaging optical unit for an HMD. The light guide can be arranged in front of at least one eye and have a concave curvature, as seen from the eye. The light can include a back surface facing the eye and a front surface facing away from the eye, an input coupling structure for coupling light into the light guide in such a way that light is guided through the light guide with reflection at the front surface and/or the back surface, and an output coupling structure for coupling out the light guided through the light guide. The light guide can have a diverging structure, the absolute value of the focal length of which is less than or equal to the radius of curvature of the light guide.

Curved light guide, imaging optical unit and HMD

An optical transmission assembly for transmitting a source image includes a waveguide assembly, an incoupling assembly for coupling light emitted from the source image into the waveguide assembly, and an outcoupling assembly for coupling the light guided in the waveguide assembly out of the waveguide assembly. The light emitted from the source image and coupled into the waveguide assembly can be propagated between the incoupling assembly and the outcoupling assembly in the waveguide assembly by means of a total reflection. The incoupling assembly has at least one diffractive incoupling grating which is inclined by an angle (&#x3b1;) ranging from 20&#xb0; to 60&#xb0; relative to a normal of a boundary surface of the waveguide assembly, and/or the outcoupling assembly has at least one diffractive outcoupling grating which is inclined by an angle (&#x3b1;) ranging from 20&#xb0; to 60&#xb0; relative to a normal of a boundary surface of the waveguide assembly.

Optical transmission assembly for transmitting a source image

A beam reverser module for an optical power amplifier of a laser arrangement comprises at least one reflecting surface for receiving an incoming laser beam propagating in a first direction and reflecting the incoming laser beam into a second direction different from the first direction, wherein the at least one reflecting surface is a highly reflecting surface of at least one mirror.

Beam reverser module and optical power amplifier having such a beam reverser module

A method for adjusting the magnification scale of an optical imaging device for exposing or inspecting substrates is provided. The optical imaging device includes a first optical element group, which includes a plurality of first optical elements in an imaging beam path. The method includes replacing optical elements of the first optical element group in the imaging beam path by optical elements of a second optical element group for the purposes of adjusting the magnification scale. The first optical element group includes two reflecting optical elements with first optical parameters, which define a first Petzval sum. The second optical element group includes two reflecting optical elements with second optical parameters, which define a second Petzval sum. The value of the first Petzval sum is at least substantially identical to the value of the second Petzval sum.

Zoom system with interchangeable optical elements

An optical system for field imaging and/or pupil imaging has an optical axis, a stop plane and an image plane. The optical system includes a lens element system that has three lens element groups, each including at least one lens element. The lens element groups are spaced apart from each other along the optical axis between the stop plane and the image plane. The three lens element groups have a first lens element material and/or a second lens element material that differs from the first lens element material.

Optical system for field mapping and/or pupil mapping

An optical zoom device for setting an imaging scale of an imaging device, which is configured for imaging an object on an image plane of an image recording device using a microscope objective, comprising an optical element arrangement is disclosed. The optical element arrangement includes an object-side zoom entrance for optical connection to an objective exit, in particular a collimated objective exit, of the microscope objective and includes an image-side zoom exit for optical connection to an image recording entrance of the image recording device. The optical element arrangement includes a tele arrangement designed according to the teleobjective principle, which includes a first optical element group with negative refractive power and a second optical element group with positive refractive power, assigned to the first optical element group for setting the imaging scale, wherein the first optical element group is arranged at the zoom exit and the second optical element group is arranged on the objective side of the first optical element group.

Optical imaging device and imaging method for microscopy

The disclosure provides to a birefringent polarizer assembly for spatially separating polarization states of a light beam, in particular in the spectral range below 300 nm. The assembly includes a first prism on the light input side and a further prism on the light output side, which are arranged along a principal light incidence direction. The first prism has a first light entrance surface and a first light exit surface. The further prism has a further light entrance surface, facing the first light exit surface, and a further light exit surface. The prisms in each case have an optical principal crystal axis oriented substantially perpendicularly to the principal light incidence direction. The crystal axes of two adjacent prisms are oriented perpendicularly to one another. A normal to the further light exit surface forms an angle not equal to 0&#xb0; with the principal light incidence direction.

Polarizer assembly for spatially separation polarization states of a light beam

In a method for converting a light beam to a line focus, wherein the line focus extends according to its length along a first direction (y) and is narrow in a second direction (x) perpendicular to the first direction (y), the light beam is directed onto at least one conical optically operative surface, by which it is converted to the line focus. The light beam is directed onto the at least one optically operative surface with a ring-segment-shaped cross section transversely with respect to the light propagation direction. A device, in particular for carrying out the method, and an optical arrangement for generating a light beam with a ring-segment-shaped cross section are likewise described. In accordance with a further method and a further device, a line focus is generated only with spherical and/or cylindrical elements.

Optical arrangement for converting an incident light beam, method for converting a light beam to a line focus, and optical device therefor

A spectrometer arrangement for measuring a spectrum of a light beam emitted by a narrowband light source, such as a bandwidth-narrowed laser, includes at least one etalon, a beam splitter for splitting the light beam into a first partial beam and a second partial beam, one or more optical directing elements for directing the first partial beam n times and the second partial beam (n+k) times through the at least one etalon, wherein n and k are integers &#x2267;1. The spectrometer arrangement further has at least one light-sensitive detector and an evaluation device for evaluating the spectra&#x2014;recorded by the at least one detector&#x2014;of the first partial beam that has passed through the at least one etalon n times and of the second partial beam that has passed through the at least one etalon (n+k) times in order to determine the light spectrum corrected for the apparatus function of the at least one etalon.

Method for measuring a spectrum of a narrowband light source, and spectrometer arrangement

The invention relates to an optical delay module for lengthening the propagation path of a light beam comprises a first spherical mirror and a second spherical mirror, the first spherical mirror and the second spherical mirror having equal radii of curvature, the first and the second mirror being arranged on a common axis of symmetry with concave sides of the first and second mirrors being situated opposite one another at a distance from one another which corresponds to the radii of curvature of the first and second mirrors. The module also includes a coupling-in area for coupling the light beam into a space between the first and second mirrors and a coupling-out area for coupling the light beam out of the space between the first and second mirrors. The propagation path of the light beam between the coupling-in area and the coupling-out area corresponding at least approximately to quadruple the mirror distance, at least one optical arrangement arranged between the first and second mirrors, the optical arrangement being arranged to transfer the light beam between the first and second mirrors in such a way that the propagation path of the light beam without masking out of beam parts between the coupling-in area and the coupling-out area corresponds approximately to 2N times the mirror distance, where N is an integer &#x3e;2.

Optical delay module for lengthening the propagation path of a light beam and pulse multiplication or elongation module

An optical component comprises at least one optically effective optical element which heats up when irradiated with light, and at least one holding element for the at least one optical element for holding the at least one optical element in a carrier structure, wherein the at least one optical element is connected to the at least one holding element in heat conducting fashion, and wherein the at least one holding element is at least partially provided with an active cooling system for carrying off heat from the at least one optical element. Additionally or alternatively, a temperature control device is provided which controls the temperature of at least a part of the mount of the optical element.

Optical component having an improved transient thermal behavior and method for improving the transient thermal behavior of an optical component

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Aalen, Germany

Holger Muenz