Oerlikon Leybold Vacuum Gmbh

Leybold Gmbh

Holger Dietz

Dirk Schiller

Axel Veit

Ernst Schnacke

Gerhard Wilhelm Walter

Heinz-Josef Dubbelfeld

Jiri Melichar

Axel Persch

Mario Pietrangeli

André Siegel

A vacuum device comprises a plurality of cryopumps () connected with one or a plurality of vacuum chambers. The cryopumps () are connected via media supply conduits () and media return conduits () with a compressor (). An adjusting device () is connected before at least one of the cryopumps for controlling the amount of media fed to the cryopump. Further, the cryopumps () comprise a temperature measuring device. The temperature measuring device and the adjusting device () are connected with a controller (). To allow the desired amount of media to be fed to the cryopumps (), the adjusting device () comprises a throttle () in a media supply conduit () and a controllable valve in a throttle bypass conduit ().

Vacuum device

A refrigerator () has a housing (), a cylindrical working chamber (), a cylindrical displacing member (), a gap () which is located between the housing and the displacing member, a regenerator which is disposed inside the displacing member, and a device alternatingly supplying the working chamber with an effective high-pressure gas and an effective low-pressure gas. In order to overcome the disadvantages associated with gas streams occurring in the gap (), an additional regenerator (gap gas regenerator), () is assigned to the gap ().

Refrigerator comprising a regenerator

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Kö'ln, Germany

Holger Dietz