Ushio America, Inc.

Holger Claus

Zoran Falkenstein

Randal S Kincade

Andre Piotrowski

Steven Osowski

A method of stabilizing an arc between electrode tips in a high pressure arc discharge lamp is provided comprising initially creating an arc between the pair of electrodes during a start-up phase of the lamp by supplying power to the lamp for a first period. The method then transitions the arc to attach itself between the tips of the electrodes by removing the power supplied to the lamp for a second period and then resupplying power to the lamp after completion of the second period. The first and second periods for respectively initially supplying and removing power are preferably selected based on either an elapsed period of time, the measured operating lamp voltage, or the measured lamp pressure. Once the arc becomes attached to the tips of the electrodes in this manner, the arc will remain stabilized between the electrode tips during operation of the discharge lamp.

Method for arc attachment stabilization

A non-oxidizing electrode arrangement for an excimer lamp that is formed by coating an electrode of the lamp with a layer of protective layer that prevents the electrode from oxidizing. The protective layer is preferably transparent and possesses a low permeability for oxygen (e.g., silicon oxide, magnesium fluoride, calcium fluoride). The interior of the excimer lamp is evacuated to a pressure level that is lower than the pressure level surrounding the excimer lamp at any time during the non-oxidizing electrode formation process in order to assist in preventing the excimer lamp from fracturing.

Non-oxidizing electrode arrangement for excimer lamps

The present invention is a hybrid sealing technique. According to one or more embodiments of the present invention, an unsealed lamp body is heated and a partial pinch seal is performed on a first side of the lamp body at an outer junction area. Then, a shrink seal is applied which completes the sealing process at the first side of the lamp body by sealing an inner junction area on the same side of the lamp body. The present invention retains the benefits of the shrink seal, but alleviates the difficulty associated with holding the electrode assemblies in place when performing a traditional shrink seal. In addition, the machine which holds the electrode assemblies in place is greatly simplified.

Hybrid sealing technique

Embodiments of the present invention are directed to a method and apparatus for heat pipe cooling of an excimer lamp. In one embodiment, a heat pipe is used to dissipate heat from an excimer lamp. The heat pipe is in direct contact with at least one electrode of the excimer lamp. In one embodiment, heat is transferred through the heat pipe to a cooling point that is electrically isolated from the lamp. In one embodiment, dissipation of heat from the cooling point is done by conventional means. In one embodiment, the heat pipe is on the inside of the lamp. In another embodiment, a heat pipe is attached to the outside of an excimer lamp. In another embodiment, two heat pipes are used, one on the inside and one on the outside of an excimer lamp. In yet another embodiment, a heat pipe is used with a flat lamp.

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Lake Forest, CA, United States of America

Holger Claus