Average Co-Inventor Count = 6.00
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Samsung Electronics Co., Ltd. (1 from 131,906 patents)
1 patent:
1. 8685272 - Composition for etching silicon oxide layer, method for etching semiconductor device using the same, and composition for etching semiconductor device