Electronics and Telecommunications Research Institute

Ho Jun Ryu

Mun Cheol Paek

Woo Seok Yang

Sang Hoon Cheon

Seong Mok Cho

Chang Auck Choi

Byoung Gon Yu

Dong Woo Suh

Yong Woo Park

Eun Kyoung Kim

Woo Seok Cheong

Yong Goo Yoo

Sung Q Lee

Chi Hoon Jun

Myung Lae Lee

Young Jun Kim

Jong Moo Lee

Hyeon Bong Pyo

Sung Hae Jung

Yeung Joon Sohn

Kang Ho Park

Sang Choon Ko

Chang Han Je

Yun Tae Kim

Kwang Yong Kang

Sung Sik Lee

Hee Sook Chung

Doo Young Hah

Chang Auk Choi

A chemical sensor using metal nano-particles and a method for manufacturing a chemical sensor using metal nano-particles are provided. The chemical sensor includes: metal nano-particles; single-ligand organic molecules (or a single molecule) that binds to the metal nano-particles by using a metal bonding functional group; a substrate bonding functional group formed at the metal nano-particles and the single-ligand organic molecules as bound to each other; a substrate; electrodes formed on the substrate and having an interdigitate (IDT) structure; and a substrate functional group formed on the substrate and positioned between the electrodes, wherein the substrate bonding functional group and the substrate functional group are covalently bonded.

Chemical sensor using metal nano-particles and method for manufacturing chemical sensor using metal nano-particles

Provided is a small piezoelectric power generator applied to a wireless sensor network system of a tire pressure monitoring system (TPMS) for monitoring an internal environment of a tire such as variation in air pressure in the tire. In particular, when the system, in which air pressure, temperature and acceleration sensors are mounted, installed in the tire is operated in the TPMS for an automobile, a small piezoelectric power generator for the TPMS can be used as a power source in place of a conventional battery. The piezoelectric power generator includes a substrate having an electrode for transmitting power to the exterior, a metal plate formed on the substrate, and a piezoelectric body disposed on the metal plate and transmitting the power generated by a piezoelectric material to the electrode.

Piezoelectric power generator

A resistive material for a bolometer, a bolometer for an infrared detector using the material, and a method of manufacturing the bolometer are provided. In the resistive material, at least one element selected from the group consisting of nitrogen (N), oxygen (O) and germanium (Ge) is included in antimony (Sb). The resistive material has superior properties such as high temperature coefficient of resistance (TCR), low resistivity, a low noise constant, and is easily formed in a thin film structure by sputtering typically used in a complementary metal-oxide semiconductor (CMOS) process, so that it can be used as a resistor for the bolometer for an uncooled infrared detector, and thus provide the infrared detector with superior temperature precision.

Resistive material for bolometer, bolometer for infrared detector using the material, and method of manufacturing the bolometer

An infrared sensor and a method of fabricating the same are provided. The sensor includes a substrate including a reflection layer and a plurality of pad electrodes, an interdigitated sensing electrode connected to the pad electrode and formed to be spaced apart from the reflection layer by a predetermined distance and a sensing layer formed on the sensing electrode and having an opening exposing a portion in which an interdigitated region of the sensing electrode connected to one pad region is separated from the sensing electrode connected to the other pad electrode. Therefore, the sensor has an electrode in a very simple constitution, and a sensing layer divided into rectangular blocks, so that current that non-uniformly flows into the electrode can be removed. Accordingly, the sensor in which current of the sensing layer can be uniformly flown, and noise is lowered can be implemented.

Infrared sensor and method of fabricating the same

In an infrared detection sensor according to the present invention, all material constituting an upper portion of a sensing electrode in a supporting arm region is removed so that a supporting arm has low thermal conductivity. As a result, thermal conductivity of the infrared sensor structure is reduced, and the infrared detection sensor has excellent sensitivity.

Infrared detection sensor and method of fabricating the same

Provided are a microbolometer having a cantilever structure and a method of manufacturing the same, and more particularly, a microbolometer having a three-dimensional cantilever structure, which is improved from a conventional two-dimensional cantilever structure, and a method of manufacturing the same. The method includes providing a substrate including a read-out integrated circuit and a reflective layer for forming an absorption structure, forming a sacrificial layer on the substrate, forming a cantilever structure having an uneven cross-section in the sacrificial layer, forming a sensor part isolated from the substrate by the cantilever structure, and removing the sacrificial layer.

Microbolometer with improved mechanical stability and method of manufacturing the same

Provided is a small form factor optical/magnetic disk including an integrated metal hub and a disk plate. The integrated metal hub includes a circular upper metal hub and a circular lower metal hub integrally formed with and disposed under the upper metal hub. The circular lower metal hub has a smaller diameter smaller than the upper metal hub. A central hole is formed in central portions of the upper and lower metal hubs and passes through the upper and lower metal hubs. The disk plate has a through-hole that is formed in a central portion and is directly associated with the integrated metal hub, and a recess that is formed around the through-hole and allows the upper metal hub to be mounted therein. Since the central portion of the small form factor optical/magnetic disk is not thick, the small form factor optical/magnetic disk can contribute to an ultra thin small form factor information storage device. Also, since manufacturing processes are simple, price and quality competitiveness can be enhanced.

Small form factor optical/magnetic disk for information storage

Provided are resistive materials for a microbolometer, a method for preparation of resistive materials and a microbolometer containing the resistive materials. The resistive materials for the microbolometer include an alloy of silicon and antimony or an alloy of silicon, antimony and germanium, which has a high TCR and a low resistance.

Resistive materials for microbolometer, method for preparation of resistive materials and microbolometer containing the resistive materials

Provided are a multilayer-structured bolometer and a method of fabricating the same. In the multilayer-structured bolometer, the number of support arms supporting the body of a sensor structure is reduced to one, and two electrodes are formed on the one support arm. Thus, the sensor structure is electrically connected with a substrate through the only one support arm. According to the multilayer-structured bolometer and method of fabricating the bolometer, the thermal conductivity of the sensor structure is considerably reduced to remarkably improve sensitivity to temperature, and also the pixel size of the bolometer is reduced to obtain high-resolution thermal images. In addition, the multilayer-structured bolometer can have a high fill-factor due to a sufficiently large infrared-absorbing layer, and thus can improve infrared absorbance.

Multilayer-structured bolometer and method of fabricating the same

An optical head has a beam input/output coupler on a planar waveguide and other parts including: a light transmitting element emitting a beam; a planar waveguide formed on a substrate and receiving the beam oscillated from the light transmitting element; a beam input/output coupler integrated as a thin film on a portion of the planar waveguide and receiving the beam through the planar waveguide to transmit the beam vertically toward a disc positioned above the planar waveguide or transmitting the beam reflected from the disc through the planar waveguide; and light receiving elements receiving the beam propagated to the planar waveguide through the beam input/output coupler.

Optical head having a beam input/output coupler on a planar waveguide

Provided is a form factor disk such as an optical or magnetic disk used in electronic appliances and information appliances. The form factor disk includes: a circular plate having a first hole for inserting a rotational shaft, a plurality of second holes formed adjacent to the first hole, and an information storage region formed at a surface thereof; an upper metal hub located on the circular plate, and having a hole aligned with the first hole of the circular plate and column-shaped joints formed at portions corresponding to the second holes of the circular plate; and a lower metal hub located under the circular plate, and having a hole aligned with the first hole of the circular plate and column-shaped joints formed at portions corresponding to the second holes of the circular plate, wherein the joints of the upper and lower metal hubs are jointed through the second holes.

Form factor disk

Provided is an apparatus and method of initializing a recording layer used in manufacturing a phase-change optical disk for storing information. The optical disk is initialized using a UV lamp in order to initialize the recording layer of the phase-change optical disk capable of repeatedly writing information, without a separate optical head, whereby it is possible to increase productivity by remarkably reducing an initialization time of the optical disk since a large area is initialized using a UV beam.

Apparatus and method of initializing phase-change optical disk

Provided are a stamper fabricated by using an embossing master and a focusing grating coupler fabricated by using the stamper, which is applicable to a subminiature pickup head for a mobile optic disk, whereby it is possible to reduce a weight and a volume of the pickup head with a simple process and low cost and to apply for mass production.

Method of fabricating stamper and focusing grating coupler using the same

Provided is a planar focusing grating coupler, comprising: a light waveguide including a cladding layer and a core layer formed on a substrate and maintaining incident laser light in a single mode; and a focusing grating coupler formed to have a predetermined grating pitch at a certain area over the core layer, wherein the light using to the light waveguide forms a focal point with the grating layer in the direction perpendicular to the focusing grating coupler, whereby an ultra small pickup head for a mobile optical disk can be used.

Growing community of inventors

Seoul, South Korea

Ho Jun Ryu