Samsung Electronics Co., Ltd.

Horiba Stec, Co., Ltd.

Ho-Gon Kim

Jun-Won Lee

Tae-Hoon Lee

Ichiro Nishikawa

Jang-Hyoun Youm

Heok-Jae Lee

Sang-Jin Choi

Masanori Terasaka

Masashi Hamada

Jae-Seok Kim

Hyun-Sik Sim

Dong-Ok Shin

Hyuk-Yul Choi

Hyung-Ho Kim

Jung-Suk Oh

A vaporizer includes a main body including a first body and a second body. The first body has an upper portion narrowing in a direction of a height of the first body and the second body has a cavity in which the first body is positioned. A mixing chamber is between the first and second bodies. The second body includes a carrier gas injection path connected to a carrier gas inlet formed in an upper portion of the mixing chamber. The carrier gas injection path carries a carrier gas. A source material injection path is connected to a source material inlet formed in the mixing chamber. The source material injection path carries a liquid source material. A discharge is connected to an outlet formed in a lower portion of the mixing chamber. A mixed fluid including the carrier gas and the liquid source material is discharged through the discharge path.

Vaporizer and thin film deposition apparatus including the same

Growing community of inventors

Hwaseong-si, South Korea

Ho-Gon Kim