Kabushiki Kaisha Yaskawa Denki

Hitoshi Wakizako

Kazunari Shiraishi

Hiroki Sanemasa

Kazunori Hino

Yukito Sagasaki

Ken-ichi Motonaga

Shinichi Ishikawa

A carrier robot system and a control method for a carrier robot enabling teaching even when an operator cannot approach a teaching position for wafer conveyance are provided. In a carrier robot system comprising a robot which has a placement portion for placing an object presenting a low-profile form thereon and carries the object and a robot controller for controlling the robot, a jig mounted on the placement portion of the robot and having an image pickup member, an image processing portion for processing an image picked up by the image pickup member, and a superior control portion for controlling the robot controller and image processing portion from a superior position are provided.

Carrier robot system and control method for carrier robot

A transfer robot () for thin substrate capable of efficiently detecting the stored state of thin substrates and an inspection method for thin substrate capable of accurately detecting the stored state of thin substrates; the robot (), comprising an inspection camera () for detecting the stored state of the thin substrates () in a storage cassette (), wherein the plurality of thin substrates () stored in the storage cassette () are carried out from the storage cassette () by the robot.

Transfer robot and inspection method for thin substrate

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Fukuoka, Japan

Hitoshi Wakizako