Mitsubishi Denki Kabushiki Kaisha

Mitsubishi Denki K.k.

Mitsubiski Denki Kaubshiki Kaisha

Hitoshi Wakata

Kenyu Haruta

Hajime Nakatani

Haruhiko Nagai

Akihiro Suzuki

Yukio Sato

Tomohiro Sasagawa

Yoshibumi Minowa

Koichi A Ono

Akihiko Iwata

Kenichi Yasuda

Mitsuo Inoue

Atsushi Sugitatsu

Tetsuya Takami

Yasushi Minamitani

Kazuyoshi Kojima

Yoshio Saito

Yukihiko Wada

Akihiko Furukawa

Takashi Kumagai

Tsuyoshi Horikawa

Takaaki Kawahara

Toshiyuki Oishi

Shuichi Fujikawa

Taisuke Furukawa

Naohiko Fujino

Noboru Mikami

Kenichi Kuroda

Mutsumi Tsuda

Hideki Yabe

Junji Tanimura

Kazuo Kuramoto

Kouji Kise

Shinji Murata

Isamu Tanakura

Hiroshi Kuroki

Tetsuo Ogama

Yasuji Matsui

Hiromi Kaneko

Hiroyuki Mukumoto

Yuito Kimura

Hideki Kita

Keisuke Nanba

Akimasa Yuki

Tetsuo Makita

A thin film forming apparatus using laser includes a chamber (1), a target (5) placed therein, a laser light source (10) for emitting laser beam to target (5), and a substrate holder (3). When target (5) is irradiated with laser beam (16), a plume (15) is generated, and materials included in plume (15) are deposited on the surface of a substrate (2) held by substrate holder (3). The laser beam emitted from laser light source (10) has its cross section shaped to a desired shape when passed through a shielding plate (4804), for example, so that the surface of the target (5) is irradiated with the beam having uniform light intensity distribution. Therefore, a plume (15) having uniform density distribution of active particles is generated, and therefore a thin film of high quality can be formed over a wide area with uniform film quality, without damaging the substrate.

Thin film forming apparatus using laser

A switch device used for a laser device, includes series-parallel connected switch elements or modules. The switch elements or modules are simultaneously turned on by trigger signals from trigger circuits. The transmission lines for connecting the trigger circuits to respective switch elements are equal to one another in length. A protecting circuit is provided for the switch elements, and indicators are provided for indicating the shortcircuit of the switch elements. In the switch device, the number of wires for the switch elements is made small and heat generated from the switch elements is effectively radiated. The modules are easily stacked, and firmly connected to a control unit for controlling the switch elements. A discharge excited laser device using the switch device has a high efficiency and a long lifetime and is reliable.

Switch device for laser

A discharge-excited laser apparatus includes a pair of discharge electrodes extending in a direction of an optical axis; a plurality of charging capacitors charged by a power source; a plurality of peaking capacitors arranged in parallel in a longitudinal direction of the discharge electrodes and receiving energy accumulated in the charging capacitors; and a plurality of semiconductor switches arranged with conductive plates in the longitudinal direction of the discharge electrodes and connected in series and in parallel to the peaking capacitors. The construction of the semiconductor switches enables uniform shift of the energy in the charging capacitors to the peaking capacitors and reduction of inductance of a loop for capacity shifting.

Discharge-excited laser apparatus

A wavelength monitor/stabilizer for narrowly controlling the bandwidth of laser; the monitor/stabilizer uses parameters Q, F or G derived by measuring diameters of interference fringes given by the beam of the wavelength-controlled narrow bandwidth laser e.g. excimer laser and those given by the reference light e.g. of a mercury lamp. The controlling is made by controlling the parameter to be in a predetermined range. An image sensing unit for detecting the interference fringes are splitted into plural image sensors with adjustable distance for enabling more rapid measurement by skipping the in-between part.

Wavelength stabilizer for narrow bandwidth laser

A saturable reactor comprising a magnetic core (1) having an annular or an elongated race-track configuration, an electrical insulator (6) disposed around the magnetic core and a conductor winding (3) wound around the insulator (6). A coolant duct (7) is provided in the insulator to extend radially transversely across the magnetic core and having a radially separated inlet and outlet (8,9). A saturable reactor may comprises an annular magnetic core (51), a conductor winding including a first conductor (55) surrounded by the magnetic core (51) and a second conductor (56) disposed around the magnetic core and connected to the first conductor (55) through a load. A control winding (54) extends through the first and second conductors (55,56), and at least one of the first and second conductors (55,56) has a notch or a through hole (57,59) for insulatingly receiving the control winding (54) therein. Also disclosed is a laser oscillator comprising a gas-filled laser chamber (81) in which a main electrode pair (82,83) is disposed in an opposing relationship to define a laser-excited discharge region therebetween. At least some of the components of an oscillation circuit for generating a laser oscillation are disposed within a first circuit component chamber (95) disposed adjacent to the laser chamber (81) and filled with an electrically insulating gas, and some other components are disposed within a second circuit component chamber (96) disposed adjacent to the first circuit component chamber (95) and filled with an electrically insulating oil.

Saturable reactor

Laser devices including a rough and a fine adjustment etalons are controlled for wavelength stabilization. Further, a power monitoring mechanism may be provided for measuring the output power of the laser beam, and the rough adjustment etalon is selectively controlled in response to the power monitoring mechanism or to the calculation means. Alternatively, a separate light source oscillating at a wavelength different from the oscillation wavelength of the laser resonator emits light which is split into two parts by a beam splitter. The beams of light emitted from the light source and reflected by the rough adjustment etalon are received by a pair of photosensors, and the rough adjustment etalon is controlled so as to minimize the differential output of the two photosensors.

Laser device with oscillation wavelength control

Method of stabilizing laser wavelength and laser device with stabilized

Laser apparatus

Methods of controlling the wavelength and output power of a laser device with two intracavity etalons are disclosed, together with a wavelength monitor capable of detecting sidebands. A method is characterized by the usage of hot/cold parameter K which takes two values 0 and 1 indicating the cold and hot state of the device, respectively. The parameter K, which is reset to 0 at the start, is set to 1 when the laser beam is stabilized; it is reset to 0, whenever the lasing pause exceeds a predetermined time length. Preparatory starting steps are performed or omitted at the start, depending on the value of K. Another method is characterized by the adjustment of the intracavity etalons during the lasing pauses, in accordance with exponential functions with thermal time constants. The sideband detecting wavelength monitor comprises a single etalon whose free spectal region FSRm is selected with respect to that, FSR.sub.2, of the fine tuning intracavity etalon in such a manner that the interference fringes of the sidebands formed by the monitor etalon are distinct from each other and from those of the central wavelength .lambda..sub.0. Namely, when i is the integer which is associated with a sideband wavelength .lambda..sub.S via the equation: .lambda..sub.S =.lambda..sub.0 +i.times.FSR.sub.2, the free spectral regions FSR.sub.2 and FSRm are selected in such a manner that the apparent wavelength differences: R=i.multidot.FSR.sub.2 +j.multidot.FSRm between the central wavelength .lambda..sub.0 and the sideband wavelengths .lambda..sub.S, wherein j is an integer which minimizes the value of R for each i, are different from zero and from each other.

Laser device with wavelength stabilization control and method of

A laser wavelength is stabilized by deriving a portion of laser beam emitted from a wavelength variable laser oscillator, spectroscopically processing the laser beam portion by means of a wavelength monitor mechanism, measuring a spatial intensity distribution of the spectroscopically processed beam portion, spectroscopically processing light having a specific wavelength and measuring a spatial intensity distribution thereof, analyzing the measured spatial intensity distribution of the spectroscopically processed beam portion on the basis of the measured spatial intensity distribution of the spectroscopically processed light having the specific wavelength, and controlling wavelength of the laser oscillator according to a result of the analysis.

Laser wavelength stabilization

A discharge excitation type short pulse laser device is provided with a preliminary ionization circuit, the effeciency of preliminary ionization of which is remarkably improved. The laser device comprises a main discharge circuit including first and second main electrodes which are confronted with each other in a laser medium, main discharge capacitor means for storing energy for main discharge, and a discharge starting high voltage switch; and a preliminary ionization circuit connected to said high voltage switch, said preliminary ionization circuit including a discharging gap for preliminary ionization, a preliminary ionization capacitor and an inductance.

Discharge excitation type short pulse laser

The present invention relates to excimer laser equipment which is one kind of gas laser, and in particular to a rare gas-halide excimer laser using rare gases and halogens as laser media, and adapted to control the concentration of halogens contained in laser media therewithin on the basis of the result of the measurement of the concentration of halogens in the laser media which is being used for the oscillation of laser rays therein, whereby the stabilized oscillation of the laser is always possible.

Excimer laser equipment

A discharge excitation type short pulse laser device which is constructed with first and second main electrodes disposed in confrontation with the direction of the laser beam axis as their longitudinal direction, an auxiliary electrode provided on the rear surface part of the second main electrode and opposed to the second main electrode through the dielectric member, a pulse circuit for applying a pulse voltage across the first and second main electrodes, and a circuit for applying a voltage across the auxiliary electrode and the second main electrode, the circuit forming a part of the pulse circuit, or being independent of the pulse circuit, wherein the second main electrode is made of an electrically conductive material having a plurality of apertures therein, the second main electrode and the dielectric member are disposed in tight adhesion each other, and the second main electrode is thinly formed to enable creeping discharge to be produced on the surface of the dielectric member, thereby distributing electrons to be the seed for the main discharge to be generated across the main electrode.

Discharge excitation type short pulse laser device

Growing community of inventors

Hyogo, Japan

Hitoshi Wakata