Riken Corporation

Other

The Institute of Physical and Chemical Research

Fuji Jukogyo Kabushiki Kaisha

Fuence Co., Ltd.

The Nexsys Corporation

Ikegami Precision Tooling Co., Ltd.

Ikegami Mold Engineering Co., Ltd.

Hitoshi Ohmori

Yutaka Yamagata

Sei Moriyasu

Shinya Morita

Nobuhide Itoh

Hideo Tashiro

Kiwamu Kase

Masahiro Anzai

Akitake Makinouchi

Takeo Nakagawa

Manabu Yamada

Susumu Shimizu

Nobuyuki Nagato

Hirohiko Shimizu

Shinji Ishii

Yoshihiro Uehara

Weimin Lin

Muneaki Asami

Takahiro Miura

Naoshi Iwamitsu

Takashi Yamashita

Kiyoshi Imai

Kotaro Yano

Kozo Inoue

Yutaka Watanabe

Toshio Kasai

Hiroyuki Sasai

Naoki Oyanagi

Yasutaka Yamamoto

Ichirou Yamaguchi

Jiro Maruyama

Masashi Shigeto

Masayuki Ishii

Akihiko Uzawa

Kineo Kojima

Takayuki Oku

Kazutoshi Katahira

Norihide Mitsuishi

Kenichi Yoshikawa

Junichi Kato

Masaru Kawata

Hidetaka Kira

Katsuhiko Kada

Joon-wan Kim

Noboru Ebizuka

Sadamasa Shigitani

Junichi Uchino

Toshiaki Uno

Kenichiro Horio

Toshiro Karaki-Doy

Naoki Arai

Kiyotaka Noguchi

Takahisa Deguchi

Hisayoshi Shindo

Yoshiyuki Ueno

Tamotsu Toeda

Hiroyuki Oguma

Yutaka Nagai

Kazuyuki Horie

Shinjirou Machida

Jun-Ichi Kato

Yasutaka c/o Fuji Jukogyo Kabushiki Kaisha Yamamoto

Jiro c/o Fuji Jukogyo Kabushiki Kaisha Maruyama

An ELID honing device includes a honing toolpositioned above a workpiecehaving a hollow cylindrical inner surface, and vertically movable and rotationally drivable about a vertical rotation axis while being rockably suspended from an upper end, and a honing guidepositioned in proximity to an upper portion of the workpiece to guide the honing tool to the hollow cylindrical inner surface. The honing toolhas a fixed guidehaving a predetermined radius R from the rotation axis to its outer peripheral surface, and honing stonesandhaving outer peripheral surfaces movable in parallel from a diameter-increased position outside the radius R to a diameter-reduced position inside the radius R and capable of being electrolytically dressed. Further, the honing guidehas a hollow cylindrical ELID electrodehaving an inner surfacefor guiding an outer peripheral surface of the fixed guide of the honing tool and capable of being subjected to a negative voltage.

Device and method for ELID honing

There is disclosed a micro surface shape measurement probe including a probe shafthaving at a distant end thereof a probe memberfor contacting an objectto be measured, a probe bodyprovided with support means for movably supporting the probe shaftin a non-contact manner, a pressing device for pressing and moving the probe shafttoward the objectto be measured, a piezoelectric sensorincorporated in the probe bodyso that a reactive force acts to a pressing force applied to the probe shaft by the pressing device, a load detecting deviceto measure a load acting on the piezoelectric sensor, a control devicefor adjusting the pressing force applied by the pressing device based on the load detected by the load detecting device, and a displacement amount measuring device for measuring a position of the probe memberin contact with the objectto be measured by the pressing force adjusted by the control device

Micro force measurement device, micro force measurement method, and micro surface shape measurement probe

There is provided a mechanochemical sensor including a minute mechanical structure body having the functional membrane formed at least on one part of its surface, a supporting part for supporting the minute mechanical structure body; and a detection part for detecting the change of a mechanical property of the minute mechanical structure body. According to the invention, it is possible to provide improved adhesion between the functional membrane and the minute mechanical structure body since the functional membrane is integrally formed in advance on the minute mechanical structure body, which will contribute to the increase of detection signal, and improvement of measurement precision and sensitivity.

Mechanochemical sensor

There are provided a base framepositioned below a horizontal axis O; a pair of clamp unitspositioned at the two ends above the base frame; a pair of support unitsthat horizontally support the long workpiece in two locations, and that are capable of moving vertically; and machining unitsthat are capable of machining the long workpiece. The two clamp unitsare capable of moving from the outside toward the inside, which support the long workpiece in two locations, and rotate around the horizontal axis O in synchronization with each other.

Apparatus and method for machining long workpiece

V-CAD data is prepared by dividing external dataconsisting of boundary data of an object into rectangular parallelepiped cellshaving boundary planes orthogonal to each other in accordance with octree division and separating the respective divided cells into internal cellspositioned on the inner side of the object and boundary cellsincluding a boundary face, and a modeling unit quantity of a prototyping materialis changed in accordance with sizes of the internal celland the boundary cellof a modeling portion. The prototyping materialis a resin, lumber powder, a low-fusing-point metal, metal powder, ceramics powder or a mixture of a binder and one of these materials, and its modeling unit quantity is set in such a manner that the modeling unit quantity is smaller than a capacity of a corresponding cell and does not protrude from the boundary plane of the cell. As a result, by using the V-CAD data, a program for rapid prototyping can be simplified, and a model production time can be greatly reduced.

Rapid prototyping method and apparatus using V-CAD data

An apparatus for controlling a neutron beam includes a plurality of columnar prismsthat are made of a material having a refractive index of less than 1 for a neutron beam, and are arranged so as to be multi-layered. The columnar prismseach have an approximately right-triangle-shaped section, and are three-dimensionally multi-layered such that respective surfacesof the columnar prisms are in parallel to one another. Stick-shaped membersare made of the above material, the stick-shaped membersare set in a plurality of grooves formed on a jigthat have the same shape, and upper surfaces of the grooves are flattened at the same time.

Apparatus for controlling neutron beam and method for manufacturing the same

(A) V-CAD data of an object () is prepared. (B) A processed surface shape after NC processing is predicted by simulation using the V-CAD data. (C) The object is subjected to NC processing by a predetermined NC program, and a processed surface shape after NC processing is measured, and (D) processing correction data is obtained from a difference between the processed surface shapes acquired by simulation and measurement, and the NC program is corrected based on the processing correction data. As a result, the ultra-precise processing is enabled even if a workpiece or a tool has low rigidity and an inconstant quantity of deformation.

Ultra-precise processing method and apparatus for inhomogeneous material

There is prepared V-CAD data obtained by dividing external dataconsisting of boundary data of an object into rectangular parallelepiped cellshaving boundary planes orthogonal to each other in accordance with octree division and separating the respective divided cells into internal cellspositioned on the inner side of the object and boundary cellsincluding a boundary face, and mold data and mold processing data used to manufacture the object are generated from data of a reference plane which at least partially comes into contact with the objectand the V-CAD data. Further, in the mold processing data, a plurality of the processing toolsare selected in descending order of a size in accordance with sizes of the internal cellsof a processing portion, and the processing toolis moved in a plane of the mold and in the thickness direction, thereby processing the mold. As a result, by using the V-CAD data, the NC processing program for mold processing can be simplified, and the mold processing time can be greatly reduced.

Die machining method and device by V-CAD data

A method of manufacturing a large double-sided curved Fresnel lens. The method includes a machining step (A) of performing ultra-precise three-dimensional machining on an upper mold and a lower mold to each have an upper transfer surface and a lower transfer surface engaging an upper surface and a lower surface of a thermoplastic resin plate, respectively. Further, the method includes a hot press molding step (B) of pressing the thermoplastic resin plate between the upper and lower molds by a predetermined pressure with the resin plate being held at a temperature higher than a softening temperature thereof and lower than a melting temperature thereof so that the thermoplastic resin plate is curved, and both lens surfaces for the double-sided Fresnel lens are respectively transferred to an upper surface and a lower surface of the thermoplastic resin plate.

Method and apparatus for manufacturing large double-sided curved Fresnel lens

The present invention comprises a metal bond grind stone having a flat plate portion and a tapered portion ; an electrode opposed to the metal bond grind stone with a gap therebetween; voltage applying means for applying a direct-current pulse voltage between the metal bond grind stone and the electrode; conductive liquid supplying means for supplying a conductive liquid between the metal bond grind stone and the electrode; and grind stone moving means for moving the metal bond grind stone in a direction orthogonal to the shaft center thereof, and an ingot of a single crystal SiC is thereby cut at the tapered portion of the metal bond grind stone and the cut surface is then specular-worked at the flat plate portion

Method and apparatus for cutting and grinding single crystal SiC

There is a workpiece clamp device for horizontally holding a thin section long workpiece having a constant section shape or having the same section shape in spaced positions in a longitudinal direction in two positions of the same section shape. The workpiece clamp device is constituted of a driving clamp device A and a driven clamp device B comprising the same holding device . The driving clamp device A rotates the workpiece centering on a horizontal axis O extending in a longitudinal direction of the workpiece, and the driven clamp device B follows movement of the workpiece and idles centering on the horizontal axis. An arbitrary portion to be machined of the workpiece can be directed in a direction in which the portion is easily machined by the rotation (e.g., upward direction).

Machining apparatus and equipment of thin section long workpiece

An aspherical reference surface is manufactured with such a shape accuracy that an interference band appears according to the aspherical shape of a surface to be measured, an aspherical wave front is formed using the reference surface, and a large aspherical surface is measured from interference within a short time. The aspherical reference surface is an aspherical surface optical element manufactured by fly-cutting or ELID-grinding, that produces the interference band from light reflected from the aspherical surface and predetermined reference light, and thereby measures the shape of the aspherical surface from interference. The aspherical surface optical element should be an aspherical reflecting mirror with such a shape accuracy that an interference band is generated and parallel light is reflected in the direction normal to the surface to be measured. Thus, the shape can be measured in a short time without using an aspherical surface standard.

Method and apparatus for measuring aspherical shape and method for manufacturing optical element using them

A thin strip-shaped grindstone is held flat under tension and moved backwards and forwards in the longitudinal direction, while the grindstone is moved in a direction perpendicular to a cylindrical ingot and cuts the ingot. A metal-bonded grindstone is used as the strip-shaped grindstone at least one pair of electrodes are disposed adjacent to both surfaces of the metal-bonded grindstone one on each side of the ingot. The metal-bonded grindstone is made the positive electrode and DC voltage pulses are applied between the grindstone and the electrodes, and at the same time, a conducting processing fluid is fed to the gaps between the metal-bonded grindstone and the electrodes, and both surfaces of the metal-bonded grindstone are dressed electrolytically on both sides while the cylindrical ingot is being cut by the metal-bonded grindstone. A large diameter, hard, refractory ingot can be efficiently cut with a small amount of cutting waste, warping and uneven thickness of the finished surface are reduced, roughness of the cut surface is small, little damage is given to the crystal during processing, running costs are low and there is a reduction in manpower requirements.

Apparatus and method for cutting ingots

The polishing pad conditioner incorporates a plurality of diamond prisms arranged regularly and protruding towards a surface to be processed, and a conducting bonding member that fixes the diamond prisms into a single body. The conducting bonding member is provided with a conducting metal plate with a plurality of holes for embedding the diamond prisms and a conducting sintered metal that is filled into the spaces between the holes and the diamond prisms and sintered. The conducting bonding member can be dressed electrolytically by passing a flow of conducting liquid through the gap between the member and an electrode placed opposite. Thus, the surface of a polishing pad can be reprocessed (reconditioned) to an appropriate roughness, so the conditioner can continue to operate under even, stable conditions for a very long time, with a rather low manufacturing cost and without contaminating the silicon wafers.

Polishing pad conditioner

A probe head and a laser interferometric displacement meter are provided. The probe head supports a probe that is capable of contacting a workpiece that is free to move in the direction of the workpiece, and drives the probe towards the workpiece. The displacement meter measures the displacement of the probe with a high accuracy without contact. The probe head is also provided with a probe shaft with steps at intermediate portions thereof and air bearings that support the probe shaft on each side of the steps. The air bearings have a high stiffness in the radial direction, and the probe shaft is made to float by using compressed air, thus the resistance of the shaft to sliding is reduced. In addition, another compressed air is supplied to the location of the step and produces a driving force in the direction of the workpiece due to the difference of cross sectional areas on each side of the step, that provides a very small load within a predetermined range. Thereby, the measuring pressure can be adjusted to a constant very small load without reducing the stiffness of the bearings of the probe, and the measuring pressures can be varied freely. Therefore, a sub-micron accuracy of about 0.1 &mgr;m can be obtained, and the equipment can be made compact and is easily applied to on-machine measurements.

Probe type shape measuring sensor, and NC processing equipment and shape measuring method using the sensor

Growing community of inventors

Wako, Japan

Hitoshi Ohmori