Mitsubishi Denki Kabushiki Kaisha

Hitoshi Nagafune

Takaaki Fukumoto

Hakushi Shibuya

Koji Ezaki

A clean dry air generating unit that includes a fan filter unit and a dry air generating apparatus arranged within a chamber of closed construction. The fan filter unit includes an open air introducing fan, a chemical filter, and a HEPA filter. The chamber of closed construction is supplied air through the fan filter unit which is then supplied to the dry air generating apparatus. Clean dry air is fed from the generating unit to an area outside of the chamber or can be reintroduced to the generating unit. The apparatus can continuously supply clean dry air at a lower cost.

Apparatus for generating chemical-free dry air

Apparatus comprising an outside-air conditioner 2, an operation zone 4, a ceiling filter 8 such as an HEPA or ULPA filter, a fan filter unit 9 comprising a chemical filter and a draft fan arranged only on an overhead carrying apparatus 5 and storing apparatus 6 arranged in the operation zone 4 in a clean room 1 chemical mist causing chemical contamination is removed to the carrying apparatus 5 and storing apparatus 6.

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Tokyo, Japan

Hitoshi Nagafune