Nikon Corporation

Oji Holdings Corporation

Hitoshi Ishizawa

Takeshi Shirai

Takao Kokubun

Atsunobu Murakami

Hiroyuki Nagasaka

Shigeru Hirukawa

Hiroaki Takaiwa

Ryuichi Hoshika

Tsuyoshi Murata

Shunsuke Niisaka

Yuki Kita

Tomohiko Yamahiro

Masahiro Kawakita

Yasuto Matsuba

This inorganic fiber sheet contains a glass fiber as a main component, while containing 3 to 20% by mass of an organic fiber having an aspect ratio of 300 to 2000 with respect to a total amount of the inorganic fiber sheet.

Inorganic fiber sheet, honeycomb molded body and honeycomb filter

An optical element is used for an exposure apparatus which is configured to illuminate a mask with an exposure light beam for transferring a pattern on the mask onto a substrate through a projection optical system and to interpose a given liquid in a space between a surface of the substrate and the projection optical system. The optical element includes a first anti-dissolution member provided on a surface of a transmissive optical element on the substrate's side of the projection optical system.

Optical element and exposure apparatus

An exposure apparatus (EX) is an apparatus which exposes a substrate (P) by irradiating exposure light (EL) onto the substrate (P) via a projection optical system (PL) and a liquid (). The exposure apparatus (EX) has a substrate table (PT) for holding the substrate (P), and a plate member () having a liquid repellent flat surface (A) is replaceably provided to the substrate table (PT) to prevent the liquid from remaining, maintaining excellent exposure accuracy.

Exposure apparatus, exposure method, method for producing device, and optical part

An MgFoptical thin film is formed on an optical surface of a base material. The MgFoptical thin film includes MgFparticles and an amorphous silicon oxide-based binder which exists on the surfaces of the MgFparticles and between the MgFparticles. Owing to this amorphous silicon oxide-based binder, the optical thin film can have high mechanical strength and high adhesion to the base material, while having excellent environment resistance and a lower refractive index.

Optical system having optical thin film including amorphous silicon oxide-based binder

CaFtranslucent ceramics includes at least two rare earth elements selected from a group consisting of La, Pr, Nd, Sm, Eu, Tb, Dy, Ho, Er, Tm, Yb, and Lu.

[object Object]

An exposure apparatus exposes a substrate by irradiating exposure light onto the substrate via a projection optical system and a liquid. The exposure apparatus has a stage which includes a substrate holder for holding the substrate, a detachable member detachably disposed on the stage so that its upper surface contacts an immersion region, and a sensor having a light transmissive member. The detachable member, on which an opening is formed in the upper surface, is disposed on the stage so that the light transmissive member is arranged within the opening.

A Ca&#x2014;La&#x2014;F based transparent ceramic, including: mixing CaFparticles and LaFparticles that are prepared separately from the CaFparticles to form a mixed body of particles, and sintering the mixed body of particles and making the mixed body transparent, thereby producing a transparent ceramic.

Ca&#x2014;La&#x2014;F based transparent ceramic, Ca&#x2014;La&#x2014;F based transparent ceramic, optical element, optical system, and ceramic-forming composition

A method of producing a Ca&#x2014;La&#x2014;F based transparent ceramic, including: mixing CaFparticles and LaFparticles that are prepared separately from the CaFparticles to form a mixed body of particles, and sintering the mixed body of particles and making the mixed body transparent, thereby producing a transparent ceramic.

Method for producing Ca-La-F based transparent ceramic, Ca-La-F based transparent ceramic, optical element, optical system, and ceramic-forming composition

Optical multi-layer thin film comprises: an outermost layer stacked above an optical surface of an optical substrate having a lower refractive index than the optical substrate; and at least a certain refractive index layer disposed between the optical substrate and the outermost layer, and having a refractive index adjustable in a predetermined range higher than that of the outermost layer. The outermost layer is formed by a wet film-formation method using: low-refractive-index fine particles made of a low-refractive-index material; and a first binder, and the certain refractive index layer is formed by a wet film-formation method using: high-refractive-index fine particles made of a high-refractive-index material; and a second binder which has a refractive index different from that of the high-refractive-index material.

Growing community of inventors

Kawasaki, Japan

Hitoshi Ishizawa