Canon Kabushiki Kaisha

Canon Semiconductor Equipment, Inc.

Hitoshi Ishihama

Hideo Saito

Yutaka Kikuchi

Naoki Asano

Kenichi Horikoshi

Yasuyoshi Hayakawa

Koichi Miyamoto

Shigeru Okamura

Akihiro Toma

Masanori Yamagata

Fumio Asano

Hirohisa Oda

Tetsuro Onuki

Hidetaka Fukiharu

Akihito Nagayama

Yasunori Kawakami

Kazuo Takeuchi

Yuusuke Suzuki

Masakazu Nagata

Junya Takahashi

Kazumichi Kuramochi

Tomio Nakayama

A cooling apparatus includes a compressor, a first flow path and a second flow path branched from a branch point, a condenser disposed downstream of the branch point in the first flow path, a first decompressor disposed downstream of the condenser, a plurality of evaporators disposed downstream of the first decompressor and connected in series, a second decompressor disposed downstream of the branch point in the second flow path, a detection unit, and a control unit. The second flow path includes a hot-gas flow path configured to connect an outlet of the second decompressor and a meeting point with the first flow path. The control unit controls a degree of opening of the second decompressor depending on the temperature detected by the first temperature-detection unit and controls a degree of opening of the first decompressor depending on the temperature and/or the pressure detected by the detection unit.

Cooling apparatus having multiple evaporators for cooling objects having different amounts of heat generation, exposure apparatus including cooling apparatus, and industrial apparatus including cooling apparatus

A plasma processing apparatus includes a vacuum chamber that accommodates an object to be processed, and provides a plasma process to the object in a vacuum or reduced pressure environment, a dielectric for transmitting microwaves to the vacuum chamber and for maintaining the vacuum or reduced environment of the vacuum chamber, a plate that has slots for guiding the microwaves to the dielectric, and a temperature control mechanism that has a cooling channel between the plate and the dielectric, and controls temperature of the dielectric.

Plasma processing apparatus and method

The present invention provides a sheet supply apparatus comprising a sheet containing device for containing a plurality of sheets, a sheet positioning member provided in the sheet containing device to position the sheets in a widthwise direction thereof by abutting against a side edge of the contained sheets, and a supply device for feeding out the sheets positioned by the sheet positioning member. Wherein the sheet positioning member is previously inclined at a predetermined angle toward a direction opposite to a direction that the sheet positioning member may be inclined by the deflection of the sheet containing device due to the weight of the sheets contained in the sheet containing device.

Sheet supply apparatus

A sheet feeding apparatus with a sheet containing tray adapted to support a plurality of sheets and being shiftable between a sheet supplying position and a waiting position, a sheet supply roller for feeding out the sheet supported by the sheet containing tray at the sheet supplying position, a driving force transmitting device connected to the sheet supply roller and adapted to transmit a driving force from a drive source, and a holding device connected to the driving force transmitting device so that the sheet containing tray is shifted to the sheet supplying position by the driving force transmitted to the sheet supply roller and capable of holding the sheet containing tray at the sheet supplying position while the plurality of sheets are being supplied by the sheet supply roller.

Sheet feeding apparatus having the ability to retract the sheet supply

The present invention provides an image forming system including a containing portion capable of containing a first sheet supporting means for stacking and supporting sheets, extender means for expanding a containing space of the containing portion in a height direction so that a second sheet supporting means having sheet containing ability greater than that of the first sheet supporting means can be contained in the expanded containing space, sheet supply means for feeding out the sheet from the first or second sheet supporting means contained in the containing portion; and image forming means for forming an image on the sheet fed by the sheet supply means. Wherein the extender means includes a plurality of extender members adapted to be arranged at both lateral sides of the sheet supporting means to increase the height of the containing portion, and connecting means for connecting the plurality of extender members.

Image forming system

Growing community of inventors

Mitsukaido, Japan

Hitoshi Ishihama