Honda Motor Co., Ltd.

Hitachi Metals, Ltd.

Other

Hitoshi Harata

Yukiya Kashimura

Tomohiro Hoshi

Mizuho Doi

Nobuhiko Yoshimoto

Hiromitsu Itabashi

Yuichi Fukuda

Hiroyuki Mima

Hitoshi Karasawa

Ken Yoshioka

Moriaki Fuyama

Tomohiro Okada

Koji Kobayashi

Saburou Kanai

Hisao Asaumi

Yasunori Abe

Osamu Shimoe

Yoshimi Torii

Yukimasa Shonowaki

Fumio Shirasaki

Takehito Usui

A plating apparatus includes a plating tank for storing a plating liquid, and applies a magnetic alloy plating to a shaft-shaped member immersed in the plating liquid by using the shaft-shaped member as a cathode. The plating apparatus further includes a rotable member configured to rotate the shaft-shaped member as a rotary shaft; annular shielding tools mounted on the outer peripheral surface of the shaft-shaped member; a plating liquid discharge nozzle including plating liquid discharge ports which are provided to face the shaft-shaped member so as to avoid the shielding tools; and an anode provided around the shaft-shaped member and the plating liquid discharge nozzle.

Plating apparatus

This magnetostrictive torque sensorincludes a rotating shaftused to rotate according to an input torque and provided with magnetostrictive filmsA andB, an excitation coilconfigured to apply an alternating magnetic fieldto the magnetostrictive film, and detection coilsA andB each of which detects a change in the magnetic characteristic of an associated one of the magnetostrictive films. The magnetostrictive torque sensor is configured so that a bias magnetic field is added to the alternating magnetic field from a bias power supplyso as to satisfy the following conditions:H&#x3c;H&#x3c;H; and&#x2212;where H(&#x3e;0) is an applied magnetic field corresponding to a maximum magnetic permeability obtained according to a magnetic hysteresis curveof the magnetostrictive film, which shows magnetization caused by the alternating magnetic field, H(&#x3e;0) is an applied magnetic field corresponding to an end of a range in which a discontinuous magnetization is performed, and H(&#x3e;0) is an applied magnetic field that determines a sensitivity range to be set on a magnetostrictive sensitivity curve representing a magnetostrictive sensitivity exhibited by the magnetostrictive film.

Magnetostrictive torque sensor and electric power steering apparatus

A magnetostrictive torque sensor of the present invention is provided with: a magnetostrictive film; a detection coil; a current direction switching device; and an inversion device, wherein: when the current flows in a direction from one side to another side of the detection coil by the current direction switching device, the torque reacted to the shaft is detected based on the input signal of the inversion device; and when the current flows in a inverse direction from another side to one side of the detection coil by the current direction switching device, the torque reacted to the shaft is detected based on the output signal of the inversion device.

Magnetostrictive torque sensor

A method for manufacturing a magnetostrictive torque sensor having low nonuniformity of sensitivity characteristics. The residual austenite content in the rotating shaft of the torque sensor is measured first. A magnetic film is subsequently subjected to a heat treatment under heat treatment conditions that are different for each of the measured residual austenite contents, and magnetic anisotropy is imparted.

Method for manufacturing magnetostrictive torque sensor

A magnetostrictive torque sensor includes a rotating shaft that is rotated by an applied torque, magnetostrictive films formed around the entire circumferential periphery of a surface of the rotating shaft in at least one location, sensor coils for sensing a change in impedance of the magnetostrictive films, and a torque calculation unit for calculating the torque applied to the rotating shaft on the basis of a signal relating to the change in impedance outputted from the sensor coils. In this magnetostrictive torque sensor, a width of the magnetostrictive films in the axial direction of the rotating shaft and a width of the sensor coils in the axial direction of the rotating shaft are set so as to fulfill the relationship 1&#x3c;(W/W)&#x3c;1.35.

Magnetostrictive torque sensor and electrically powered steering apparatus using same

A magnetostrictive torque sensor comprising a first magnetostrictive film, a second magnetostrictive film, and a third magnetostrictive film formed over the entire circumferential periphery of a surface of a rotating shaft. A first sensor coil, a second sensor coil, and a third sensor coil for sensing changes in impedance are provided for the first, second, and third magnetostrictive films, respectively. Signals according to the changes in impedance outputted from the first through third sensor coils are inputted to a torque calculating unit. The torque calculating unit calculates the torque applied to the rotating shaft on the basis of the output signal from the first sensor coil and the output signal from the second sensor coil. Furthermore, the output signals from the first through third sensor coils are compared, and failures in the first magnetostrictive film or the second magnetostrictive film are detected by a failure detector.

A magneto resistive sensor having a GMR magnetic laminated film is disclosed. The GMR magnetic laminated film comprises a plurality of magnetic thin layers having a NiCoFeB composition alternately laminated with a nonmagnetic thin layer, such as copper layer. Since the magnetic thin layer contains B in its composition, the GMR magnetic laminated film can stand in magneto resistance ratio (&Dgr;R/R %) under a high temperature of up to 250 degrees centigrade. By the reason, electric wiring can be connected by a lead-free solder to assemble a magnetic resistive sensor for a magnetic rotary encoder. The thermal resistance variation and the magneto resistance ratio are further improved when a NiFeCr underlayer is used under the GMR magnetic laminated film.

Magneto resistive sensor

To provide a bearing sensor having a thin plane coil for applying a biasing magnetic field and at least one magneto resistive element pair (a first magneto resistive thin plate and a second magneto resistive thin plate) crossing opposed conductor sides of the coil. The plane coil has at least one pair of opposed conductor sides (a first side and a second side). The first magneto resistive thin plate and the first side cross one another at an angle more than 30 degrees and less than 90 degrees. The second magneto resistive thin plate and the second side cross one another at an angle more than 30 degrees and less than 90 degrees. While biasing magnetic fields in opposite directions are applied to the magneto resistive thin plates, respectively, intermediate potentials of the magneto resistive element pair are measured to determine bearings based on the difference between the intermediate potentials.

Bearing sensor having magneto resistive elements

A method of processing specimens, an apparatus therefor, and a method of manufacture of a magnetic head are provided wherein a complicated conventional post processing step for removing corrosion products is eliminated by a corrosion prevention processing for removing only a residual chlorine compound produced in the gas plasma etching. More specifically, the method is comprised of the steps of: forming a lamination film including a seed layer made of NiFe alloy, an upper magnetic pole made of NiFe alloy connected to the seed layer, a gap layer made of oxide film in close contact with the seed layer, and a shield layer made of NiFe alloy in close contact with the gap layer; plasma-etching the seed layer with a gas which contains chlorine using the upper magnetic pole as a mask; and after that removing the residual chlorine compound by a plasma post treatment with a gas plasma which contains H2O or methanol.

Growing community of inventors

Utsunomiya, Japan

Hitoshi Harata