Oki Electric Industry Co., Ltd.

Hitachi High-tech Corporation

Hitomi Sakai

Hiroyuki Saito

Daisuke Sato

Keiichiro Hitomi

Kenji Sawaguchi

Kazuma Tanii

A method of displaying preset information according to an embodiment may include: storing plural pieces of preset information including first preset information and second preset information; obtaining, from a target file that is to be processed and includes first association information associated with the first preset information, the first association information; and displaying one or more pieces of preset information out of the plural pieces of preset information that are stored, while preferentially displaying, based on the obtained first association information, the first preset information associated with the first association information with respect to the second preset information.

Method of displaying preset information and information processing apparatus

Provided are a charged particle beam device and a charged particle beam adjustment method capable of observing or inspecting a change in observation conditions in a more appropriate beam state while preventing an increase in a time required for each measurement point. The charged particle beam device includes a condenser lensand an objective lensconfigured to focus an electron beamemitted from an electron source, a primary beam scanning deflectoror a secondary electron deflector, an adjusting elementconfigured to adjust an axis of the electron beam, and a control deviceconfigured to supply a signal representing a control amount to the adjusting elementfor control. The control deviceis configured to determine the control amount by using a change amount of an intensity of the condenser lens, the objective lens, the primary beam scanning deflector, or the secondary electron deflector, and a calculation formula or a table showing a relation between the change amount of the intensity and the control amount.

Charged particle beam device and charged particle beam adjustment method

Growing community of inventors

Tokyo, Japan

Hitomi Sakai