Sony Corporation

Hitomi Kamiya

Taichi Natori

Yoshinori Toumiya

Tadayuki Dofuku

Ina Hori

Yukihiro Sayama

Masaya Shimoji

Yoshikazu Tanaka

Takayuki Shoya

Yasunori Koshino

Youichi Otsuka

Kazuaki Ogawa

Disclosed herein is a solid-state image pickup device including a solid-state image pickup element operable to produce an electric charge according to the amount of light received, a lens disposed on the upper side of a pixel of the solid-state image pickup element, a protective film which covers the upper side of the lens and a surface of which is flattened, and a surface film which is formed at the surface of the protective film and which is higher in hydrophilicity than the inside of the protective film.

Solid-state image pickup device, method of manufacturing solid-state image pickup device, and electronic apparatus

Disclosed herein is a method of manufacturing a solid state imaging device, including the steps of: forming a light receiving portion in a light receiving area of a semiconductor substrate; forming a pad portion in a pad area of the semiconductor substrate; forming a microlens material layer over the light receiving portion and the pad portion; providing the microlens material layer with a microlens corresponding to the light receiving portion; forming a low-reflection material layer on the microlens material layer; etching the microlens material layer and the low-reflection material layer over the pad portion to form an opening; and imparting hydrophilicity to a surface of the low-reflection material layer and an inside portion of the opening by a normal temperature oxygen radical treatment.

Method of manufacturing solid state imaging device, and solid state imaging device

Growing community of inventors

Kanagawa, Japan

Hitomi Kamiya