Entegris, Inc.

Hitendra Patel

Jonathan W Dube

Christopher Brown

Keith Hao-Kiet Huynh

The disclosure provides a process for preparing solid tri(C-Calkyl)ammonium dihydrogen phosphates such as triethylammonium dihydrogen phosphate, in high yield, and in a free-flowing particulate form. The solid product advantageously possesses less than about 1500 ppm of aprotic organic solvents, less than about 1500 ppm of C-Calkanols, and less than about 500 ppm of water, as determined by Karl Fischer titration.

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Toronto, Canada

Hitendra Patel