Rigaku Industrial Corporation

Hisayuki Kohno

Yoshiyuki Kataoka

Yasujiro Yamada

Makoto Doi

Takashi Shoji

Shirou Higaki

Masatsugu Kuraoka

Noboru Yamashita

Eiichi Furusawa

An X-ray fluorescence spectrometer for measuring the concentration of sulfur contained in a sample (S), by irradiating the sample (S) with primary X-rays from an X-ray tube (), monochromating fluorescent X-rays emitted from the sample (S) with a spectroscopic device, and detecting monochromated fluorescent X-rays with an X-ray detector. The spectrometer includes the X-ray tube () having a target with an element including chromium, an X-ray filter () disposed on a path of travel of X-rays between the X-ray tube () and the sample (S) and having a predetermined transmittance for Cr&#x2014;K&#x3b1; line from the X-ray tube () and made of a material which is an element of which absorption edges do not exist between energies of S&#x2014;K&#x3b1; line and Cr&#x2014;K&#x3b1; line, and a proportional counter () having a detector gas containing a neon gas or a helium gas.

X-ray fluorescence spectrometer

A scanning X-ray fluorescence spectrometer includes a quantitatively analyzing device () which calculates the concentration of hexavalent chrome based on the fact that the peak spectroscopic angle, at which the maximum intensity is attained in Cr&#x2014;K&#x3b1; line (), changes depending on the ratio of the concentration of the hexavalent chrome vs. the concentration of the intensity of the total chrome. A plurality of detecting device () having different resolutions as a combination of a divergence slit (), a spectroscopic device (), a receiving slit () and a detector () is provided such that when the change of the peak spectroscopic angle is to be detected, a detecting device (B) having a higher resolution than that of the detecting device (A), which is selected when the concentration or the intensity of the total chrome is to be determined, is selected.

X-ray fluorescence spectrometer and program for use therewith

An X-ray fluorescence spectrometer includes an X-ray sourcefor irradiating a sampleat a predetermined incident angle &#xf8; with primary X-rays, and a detecting devicefor measuring an intensity of fluorescent X-raysgenerated from the sample at a predetermined detection angle &#x3b1; and &#x3b2;, wherein with two combinations of the incident angle &#xf8; and the detection angle &#x3b1; and &#x3b2;, in which combinations the incident angles &#xf8; and/or the detection angles &#x3b1; and &#x3b2; are different from each other, each intensity of the fluorescent X-raysis measured and, also, the incident angle &#xf8; and the detection angle &#x3b1; and &#x3b2; in each of the combination are so set that with respect to a measurement depth represented by the coating weight, at which the intensity of the fluorescent X-raysattains a value equal to 99% of the uppermost limit when the coating weight of a target coating to be measured is increased, respective measurement depths in the two combinations may be a value greater than the coating weight of a coating

A fluorescent X-ray analyzer has at least three optical detection paths along which the secondary fluorescent X-ray to be analyzed travels selectively and includes a monochromator (,) carried by a first spindle (,) having a longitudinal axis (O) passing in touch with a light receiving surface of the monochromator (,). A first detector (,A) for measuring the intensity of at least a portion of the secondary X-ray (,) monochromatized by the monochromator (,) while allowing the remaining portion of the secondary X-ray (,) to pass therethrough, and a light receiving slit member (,) for passing the secondary X-ray (,) monochromatized by the monochromator (,) therethrough are carried by a second spindle (,) in side-by-side relation in a circumferential direction. A third spindle (,) is utilized separate from the second spindle (,) for carrying a second detector (,B) for measuring the intensity of the secondary X-ray (,) having passed through the first detector (,A) or the light receiving slit member (,).

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Takatsuki, Japan

Hisayuki Kohno