Saginomiya Seisakusho, Inc.

The University of Tokyo

Kabushiki Kaisha Saginomiya Seisakusho

Omron Corporation

Keio University

Shizuoka University

Hisayuki Ashizawa

Hiroshi Toshiyoshi

Hiroyuki Mitsuya

Masahiro Morita

Hiroyuki Fujita

Kazunori Ishibashi

Noriko Shimomura

Gen Hashiguchi

Masato Suzuki

Hiroshi Imamoto

Masatoshi Oba

Takuro Ishikawa

Tatsuhiko Sugiyama

Akito Mori

Song-Ju Kim

Masashi Aono

A MEMS element according to the present invention is provided with a base, an insulation layer fixed to one surface of the base, a first upper layer at least portions of which are fixed to the insulation layer, and a second upper layer provided surrounding the first upper layer and disposed being separated from the first upper layer by slits, wherein the first upper layer includes, at predetermined portions, protruding portions protruding toward the second upper layer, and the protruding portions are fixed to the insulation layer.

MEMS element and vibration-driven energy harvesting device

An energy harvesting element capable of efficiently generating power is provided. The energy harvesting element generates power by vibration, and includes a first electrode and a second electrode, a member having a third electrode electrically connected to the second electrode, and facing the first electrode, and a fourth electrode relatively fixed to the third electrode without being electrically connected to the third electrode, and electrically connected to the first electrode and facing the second electrode, the member being provided between the first electrode and the second electrode, and an electret provided in one of the first electrode and the third electrode, and one of the second electrode and the fourth electrode.

Energy harvesting element and energy harvesting device

A vibration-driven energy harvesting element includes fixed electrodes that are fixed to a base part, a movable electrode that is movable with respect to the fixed electrodes, and an elastic support part that includes one end fixed to the base part and another end fixed to the movable electrode and elastically supports the movable electrode. The elastic support part of the vibration-driven energy harvesting element includes a plurality of elastic structures each of which has a linking portion, a first elastic portion, and a second elastic portion. The first elastic portion having one end fixed to the linking portion and another end fixed to the movable electrode and extending in a second direction orthogonal to a first direction in which the movable electrode vibrates. The second elastic portion having one end fixed to the linking portion and another end fixed to the base part and extending in the second direction. The plurality of elastic structures being disposed on both sides of the movable electrode in the first direction; and connecting members that connect the linking portions included in the plurality of elastic structures to each other.

Vibration-driven energy harvesting element and method for manufacturing the same

A measurement system includes a vibration generation unit that generates sound or vibration in response to a change in environmental state quantity, a vibration-driven energy harvesting unit that generates electric power using the sound or vibration generated by the vibration generation unit, and a transmission unit that is driven with the electric power generated by the vibration-driven energy harvesting unit and transmits predetermined information.

Measurement system and diagnosis system

A vibration-driven energy harvesting device includes a vibration-driven energy harvesting element that generates power according to vibrations of an electrode; an output unit that, when connected to a load resistor, extracts power generated by the vibration-driven energy harvesting element; a judgment unit that judges whether or not a power value of the power is greater than a predetermined threshold value; a determination unit that determines an input impedance of the output unit based on a judgment result obtained by the judgment unit; and an adjustment unit that adjusts the input impedance of the output unit according to a determination made by the determination unit.

Vibration-driven energy harvesting device

This MEMS element comprising: a base; a movable portion; and an elastic portion, and a fixing portion; and a fixed portion body to which the elastic portion is fixed, wherein the elastic portion extends in a direction intersecting a moving direction of the movable portion, includes a central portion receiving a force of the movable portion, and one end and another end fixed to the fixed portion body, and includes thin portions respectively between the central portion and the one end and between the central portion and the other end, the thin portions being thinner than the central portion, the one end, and the other end.

This MEMS beam structure that elastically supports a movable section displaced in a first direction includes: a first beam section and a second beam section extending in a second direction orthogonal to the first direction; and a linking section that connects the tip of the first beam section and the tip of the second beam section that is connected to the movable section, wherein the first beam section and the second beam section each have a shape as a beam of uniform strength, and the beam section root of the second beam section is displaced relatively in the first direction with respect to the beam section root of the first beam section according to the displacement of the movable section in the first direction.

MEMS beam structure and mems vibration-driven energy harvesting element

A power supply circuit that outputs an electric power that is input from a vibration-driven energy harvesting element to an external load, includes: a negative half-wave rectifying circuit that half-wave rectifies an alternating current power that is input from the vibration-driven energy harvesting element, into a negative voltage output; an inverting chopper circuit that inverts and outputs the negative voltage output which is output from the negative half-wave rectifying circuit, into a positive voltage output.

Power supply circuit and vibration-driven energy harvester

A vibration-driven energy harvesting element that outputs an alternating current power from an output line, due to vibration from outside includes: an intermediate electrode that is not connected to the output line; a plurality of electret electrodes, each electret electrode being arranged to face the intermediate electrode and having an electret on at least a part of a surface of the electret electrode on a side facing the intermediate electrode; a holding unit that holds the intermediate electrode and the plurality of electret electrodes such that the intermediate electrode and the plurality of electret electrodes can vibrate with respect to each other; and a charge injector that injects a charge having characteristics opposite to a charge of the electrets formed in the surfaces of the plurality of electret electrodes, to the intermediate electrode.

Vibration-driven energy harvesting element and vibration-driven energy harvesting device

A power supply circuit that outputs an electric power input from a vibration-driven energy harvesting element to an external load includes a rectifying circuit that rectifies an alternating current power input from the vibration-driven energy harvesting element; a first capacitor that accumulates a power output from the rectifying circuit; a chopper circuit that has a switching element controlling a chopper timing and has an input terminal connected to the first capacitor; and a control signal generation unit that supplies a control signal to the switching element, wherein: the control signal generation unit generates the control signal without referring to a voltage of the first capacitor.

A vibrational energy harvester element includes: a first electrode; a second electrode that moves in a predetermined direction with respect to the first electrode; a third electrode; a fourth electrode that moves in the predetermined direction with respect to the third electrode; and a support portion that supports the second electrode and the fourth electrode so that they are movable along the predetermined direction; and wherein: the first electrode and the third electrode are disposed along the predetermined direction; at least one of facing surfaces of the first electrode and the second electrode, and at least one of facing surfaces of the third electrode and the fourth electrode, are electrically charged; and the support portion supports the second electrode and the fourth electrode in a state in which electrostatic force between the first electrode and the second electrode, and electrostatic force between the third electrode and the fourth electrode are balanced along the predetermined direction.

Vibrational energy harvester element

The vibration-driven energy harvester includes: a first electrode; a second electrode facing the first electrode; a holder holding the first electrode and the second electrode so as to be movable relative to each other; a half-wave rectifier electrically connected to the first and the second electrodes that causes current flowing from the first electrode to the second electrode to flow to an output unit, and cuts off current flowing from the second electrode toward the first electrode; and a second rectifying element electrically connected to the first and the second electrodes that allows the current flowing from the second electrode to the first electrode and blocks the current flowing from the first electrode to the second electrode, wherein: the first electrode has a positively charged electret in a surface facing the second electrode, or the second electrode has a negatively charged electret in a surface facing the first electrode.

Vibration-driven energy harvester

A vibration-driven energy harvesting device includes: a first vibration-driven energy harvesting assembly constituted with a first fixed comb tooth portion and a first movable comb tooth portion that are interdigitated with each other; a second vibration-driven energy harvesting assembly constituted with a second fixed comb tooth portion and a second movable comb tooth portion that are interdigitated with each other; a first output electrode connected to the first vibration-driven energy harvesting assembly; and a second output electrode connected to the second vibration-driven energy harvesting assembly, wherein: an output of the first vibration-driven energy harvesting assembly is different from an output of the second vibration-driven energy harvesting assembly.

Vibration-driven energy harvesting device and vibration-driven energy harvester

A vibration energy harvester includes: a first electrode; and a second electrode that can be displaced relative to the first electrode along a predetermined vibrating direction. At least either of a surface of the first electrode and a surface of the second electrode facing opposite each other is electrically charged. Power is generated as the second electrode becomes displaced causing a change in electrostatic capacitance between the first electrode and the second electrode. A range having included therein at least a vibrational center of the second electrode, over which the electrostatic capacitance remains unchanged even as the second electrode is displaced, is set.

Vibration energy harvester

An electret element includes: an Si layer, an SiOlayer formed at a surface of the Si layer; and an electret formed at the SiOlayer near an interface of the SiOlayer and the Si layer.

Growing community of inventors

Sayama, Japan

Hisayuki Ashizawa