Panasonic Corporation

Panasonic Intellectual Property Management Co., Ltd.

Hisayoshi Matsuo

Tetsuzo Ueda

Masahiro Hikita

Daisuke Ueda

Yasuhiro Uemoto

Tatsuo Morita

Kenichiro Tanaka

Hideyuki Okita

A nitride semiconductor device including a substrate, a channel layer, a carbon-poor barrier layer having a recess, a carbon-rich barrier layer disposed over the recess and the carbon-poor barrier layer, and a gate electrode above the recess, wherein the carbon-poor and carbon-rich barrier layers have bandgaps larger than that of the channel layer, the upper surface of the carbon-rich barrier layer includes a first main surface including a source electrode and a drain electrode, and a bottom surface of a depression disposed along the recess, and side surfaces of the depression connecting the first main surface to the bottom surface of the depression, and among edges of the depression of the carbon-rich barrier layer which are boundaries between the first main surface and the side surfaces of the depression, the edge of the depression of the carbon-rich barrier layer closest to the drain electrode is covered with the gate electrode.

Nitride semiconductor device and method of manufacturing the same

A method for manufacturing a transistor assembly includes the steps of: (a) forming a transistor; (b) polishing a base substrate; and (c) securing the transistor of which the base substrate is polished to a support substrate. The step (a) is a step of forming a first semiconductor layer and a second semiconductor layer on a principle surface of the base substrate. The step (b) is a step of polishing a surface of the base substrate opposite to the principle surface. The step (c) is a step of securing the transistor on the support substrate in the presence of a stress applied on the base substrate in such a direction that a warp of the base substrate is reduced. The base substrate is made of a material different from that of the first semiconductor layer and the second semiconductor layer, and a tensile stress is applied on the second semiconductor layer.

Transistor assembly and method for manufacturing the same

A nitride semiconductor device includes a semiconductor stacked structure which is formed of a nitride semiconductor having a first principal surface and a second principal surface opposed to the first principal surface and which includes an active layer. The first principal surface of the semiconductor stacked structure is formed with a plurality of indentations whose plane orientations are the {0001} plane, and the plane orientation of the second principal surface is the {1-101} plane. The active layer is formed along the {1-101} plane.

Nitride semiconductor device and method for fabricating the same

A field-effect transistor has a so-called double heterostructure which is formed such that a channel layer through which electrons travel is provided between an electron supply layer and a liner layer, wherein a forbidden band width of the liner layer and a forbidden band width of the electron supply layer are broader than a forbidden bandwidth of the channel layer.

Growing community of inventors

Toyama, Japan

Hisayoshi Matsuo