Omron Corporation

Hisayasu Morino

Kenichi Matoba

Masayuki Hayakawa

Takahiro Okuda

Mariko Marukawa

Jun Takashima

Takahiro Suga

Naoki Fujiwara

Hiroaki Takimasa

Kazuya Kimura

Yusuke Nagasaki

In one or more embodiments of an optical interference measurement apparatus, first return light received by a first measurement head is guided to a detector via a first optical path and a fiber coupler. Second return light received by a second measurement head is guided to the detector via a second optical path and the fiber coupler. Optical path lengths Dand Dfrom the fiber coupler to a leading end of the first measurement head and a leading end of the second measurement head respectively, a maximum optical path length Rmax of the measurement range of the first measurement head, optical path lengths Sand Sof the first reference light that interferes with the first return light and of the second reference light that interferes with the second return light respectively are set such that the relation D+Rmax−S<D−Sis satisfied.

Optical interference measurement apparatus having optical path lengths set to satisfy a given relation

Provided is a confocal sensor having a wider measuring range. A confocal sensorcomprises: a light sourcethat emits light at a plurality of wavelengths; a diffractive lensthat causes a chromatic aberration with respect to the light along an optical axis and focuses the light onto an objectwithout another intervening lens; a pinholethrough which reflected light passes, the reflected light being a portion of the light that was focused onto and reflected from the objectand focused by the diffractive lens; and a measuring unitthat measures the distance from the diffractive lensto the objecton the basis of a wavelength of the reflected light. A distance Lfrom the pinholeto the diffractive lensis variable.

Confocal sensor

A white light confocal optical measurement device capable of detecting abnormalities in a received light waveform; the optical measurement device includes: a light source; an optical system; a light receiving unit; and a processor configured to compute the distance from the optical system to the measurement object on the basis of a received light intensity of the wavelength components received in the light receiving unit. The processor compares a received light intensity of a wavelength component to a reference value for the wavelength component for a plurality of wavelength components in a waveform representing the light received, and detects an abnormality in the received light waveform when the amount of change in the received light intensity compared to the reference value therefor is greater than or equal to a predetermined threshold for any wavelength component in the plurality of wavelength components.

Optical measurement device

The optical measuring device includes a light source that outputs light of a plurality of wavelengths; a sensor head including a conversion lens that converts light incident via a light guide part, which includes a plurality of cores, into parallel light, and an objective lens that irradiates the light in which chromatic aberration is generated to a measurement object; and a spectroscope that acquires reflected light reflected by the measurement object and condensed by the sensor head via the light guide part and measures a spectrum of the reflected light. In the sensor head, a shield that shields light is arranged between the conversion lens and the objective lens to inhibit light emitted from one core among the plurality of cores included in the light guide part from entering cores other than the one core as the reflected light.

Optical measuring device

A confocal measurement device includes a light source that outputs white light, an optical coupler, a sensor head that applies light with a chromatic aberration caused therein to a measurement object, and a spectroscope that acquires reflected light which is reflected by the measurement object and measures a spectrum of the reflected light. The optical coupler is a filter type coupler or a spatial optical system type coupler that brings a first transmission waveform when light is transmitted from a first optical fiber cable to a second optical fiber cable and a second transmission waveform when light is transmitted from the second optical fiber cable to a third optical fiber cable close to each other.

Confocal measurement device

A confocal measuring device capable of enlarging a measurement range using a compact device configuration is provided. A confocal measuring device (A) is configured to include: a diffractive lens () that causes chromatic aberration in light emitted from a white LED light source (); a diffractive lens () that increases chromatic aberration of light passing through the diffractive lens (); and an objective lens () that condenses light into a measurement target range such that the condensed light has chromatic aberration along an optical axis.

Confocal measuring device

To improve light use efficiency and thereby achieve even higher sampling rates. An optical measurement device includes: a light source configured to emit illumination light including a plurality of wavelength components; an optical system configured to introduce an axial chromatic aberration into the illumination light from the light source and to receive reflection light reflecting from a measurement object where at least a portion of the measurement object lies along a line extending from the optical axis of the optical system; a spectrometer for separating the reflection light received at the optical system into wavelength components, and a detector including a plurality of light receiving elements arranged one-dimensionally to correspond to the dispersion direction of the spectrometer.

Growing community of inventors

Fukuchiyama, Japan

Hisayasu Morino