Tokyo Electron Limited

Ibiden Company Limited

Kabushiki Kaisha Toshiba

Hisatomi Hosaka

Kiyoshi Takekoshi

Jun Mochizuki

Nobuo Hayasaka

Hisashi Kaneko

Takamasa Usui

Junichi Hagihara

Yoshiyuki Ido

Kunihiko Hatsushika

Yuichi Abe

Shuji Akiyama

Takashi Amemiya

Tsuyoshi Aruga

Wataru Mochizuki

A reliability evaluation test apparatus of this invention includes a wafer storage section which stores a wafer in a state wherein the electrode pads of a number of devices formed on the wafer and the bumps of a contactor are totally in electrical contact with each other. The wafer storage section transmits/receives a test signal to/from a measurement section and has a hermetic and heat insulating structure. The wafer storage section has a pressure mechanism which presses the contactor and a heating mechanism which directly heats the wafer totally in contact with the contactor to a predetermined high temperature. The reliability of an interconnection film and insulating film formed on the semiconductor wafer are evaluated under an accelerated condition.

Reliability evaluation test apparatus, reliability evaluation test system, contactor, and reliability evaluation test method

The present invention provides a probe card that can examine an object with small electrode spacing. A probe supporting plate is provided to a lower face side of a printed wiring board of a probe card. A plurality of probes are supported by the probe supporting plate. The probes comprise an upper contact, a lower contact, and a main body portion. An upper end portion of the upper contact protrudes toward an upper side of the probe supporting plate and contacts a terminal of the printed wiring board. A lower end portion of the lower contact protrudes toward a lower side of the probe supporting plate. On the probe supporting plate, a through-hole and a concave portion are formed to luck the probes, and the probes can be inserted and removed freely against the probe supporting plate from above.

Probe card

It is an object of the present invention to dramatically reduce thermal deformation without using any special material in a multilayer substrate and a probe card. According to the present invention, in a probe card including at least one circuit board connected in an electrically conductive manner to a probe brought into electrical contact with an inspection object, the circuit board includes a base layer and a surface layer stacked on at least an inspection object side surface of the base layer. The surface layer has a higher coefficient of thermal expansion than that of the base layer, and grooves dividing the surface layer into a plurality of areas are provided in the surface layer.

Multilayer substrate and probe card

It is an object of the present invention to realize sure electrical connection between a contactor and an object to be inspected without influenced by heat, a reduction in the pre-heating time, and an enhanced throughput. A probe card of the present invention includes a contactor, a printed wiring board, an interposer provided between the contactor and the printed wiring board to have the both in elastic and electrical contact with each other, a coupling member integrating these, and a reinforcing member reinforcing the printed wiring board integrated via the coupling member.

A probe which can be easily formed, is not limited in a mounting position and number, and capable of sufficiently securing a space allowing a contact to move is provided. The probe has a contact to be brought into contact with an inspection object, and a beam part supporting the contact at a tip end portion. A rear portion of the beam part of the probe is joined to a surface at an inspection object side, of a contractor disposed to be opposed to the inspection object. The beam part of the probe is bent so that the above described contact at the tip end portion inclines to the above described inspection object side.

Method for forming connection pin, probe, connection pin, probe card and method for manufacturing probe card

A probe is disclosed, comprising a beamB, which has a front endb, an intermediate portionband a base endb, the front end being a portion for contacting a test subject through a contactor, the base end being a portion for fixing the probe; and a substantially trapezoidal contactorA, which is fixed to the leading endbof the beam.

Method of producing a probe with a trapezoidal contactor

A probe card includes a contactor supporting probes, and a printed wiring board electrically connected to the contactor. An elastic sheet is interposed between the contactor and the printed wiring board. The elastic sheet is formed so that elasticity in a central side is smaller than that in an outer peripheral side of the contactor. An elastic reaction force which acts on the contactor from the elastic sheet when the elastic sheet is compressed becomes weaker at the central part side as compared with the outer peripheral side of the contactor. Thereby, the bending amount of a central part of the contactor which is away from a fixed end and bends the most is reduced, and horizontality of the contactor is maintained.

The present invention provides a probe card that can examine an object with small electrode spacing. A probe supporting plate is provided to a lower face side of a printed wiring board of a probe card. A plurality of probes are supported by the probe supporting plate. The probes comprise an upper contact, a lower contact, and a main body portion. An upper end portion of the upper contact protrudes toward an upper side of the probe supporting plate and contacts a terminal of the printed wiring board. A lower end portion of the lower contact protrudes toward a lower side of the probe supporting plate. On the probe supporting plate, a through-hole and a concave portion are formed to lock the probes, and the probes can be inserted and removed freely against the probe supporting plate from above.

A probe is disclosed, comprising a beam, which has a front end, an intermediate portion and a base end. The leading end is a portion for contacting a test subject through a contactor, the base end being a portion for fixing the probe. The probe includes a substantially trapezoidal contactor, which is fixed to the leading end of the beam.

Probe with trapezoidal contractor and device based on application thereof, and method of producing them

A probe system according to the present invention has a plurality of exploration portions disposed in a line, spaced apart from one another for predetermined distances and each having a test head, for establishing electrical connection between the test head and electrodes of a subject of exploration so as to explore electrical characteristics of the subject of exploration, a conveyance passage running parallel to the line of the exploration portions, a retainer portion on which a plurality of the subjects of exploration are placed, which is facing to the conveyance passage and which is capable of elevating vertical with respect to the conveyance passage at a position above the conveyance passage, and delivery and acceptance unit arranged capable of moving along the conveyance passage and arranged to deliver and accept the subjects of exploration between the retainer portion and each of the exploration portions.

Growing community of inventors

Nirasaki, Japan

Hisatomi Hosaka