Renesas Electronics Corporation

Hisato Inaba

Toshiki Kanamoto

By considering a Deep Nwell diffusing into a Pwell region, accuracy of a substrate parasitic-resistance extraction is improved. A well region of a semiconductor integrated circuit where a Pwell and a Deep Nwell are formed in a substrate is divided into two or more meshes each including two or more resistor segments and a substrate noise is analyzed based thereon. In this regard, parallel components of resistors coupling the Pwell with the substrate are deleted in accordance with a state of the Deep Nwell diffusing into the Pwell region, so that an arithmetic processing unit executes a process for expressing a rise in the resistance value. By deleting the parallel components of the resistors coupling the Pwell with the substrate, the rise in the resistance value caused by the Deep Nwell can be reflected in the substrate parasitic-resistance extraction. Therefore, the accuracy of the substrate parasitic-resistance extraction can be improved.

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Hyogo, Japan

Hisato Inaba