Canon Kabushiki Kaisha

Hisashi Namba

Noriyasu Hasegawa

Ken Katsuta

Makoto Sato

Osamu Tsujii

Takashi Ogura

Masahiko Okunuki

Yuichi Takahashi

Tatsuya Hayashi

Yosuke Murakami

Keita Sakai

Nobuto Kawahara

Masahiro Kuri

Masahiro Ogura

Yasuaki Otoguro

Hideki Matsumoto

Eiji Sakamoto

Yuta Okada

Yoshimasa Araki

Akiko Iimura

Takashi Kamono

Imprint apparatus includes: a discharge-unit including a nozzle-array that plurality of nozzles are arranged in a nozzle-array-direction, a moving-unit to move relative-positions of a substrate and the discharge-unit, and a discharge-control-unit control to apply a resin to the substrate by applying a resin from a nozzle corresponding to a predetermined-cycle in the nozzle-array-direction in the discharge-unit and by moving the relative-positions by the moving-unit, the imprint apparatus including an identifying-unit to identify a discharging defective-nozzle in the discharge-unit and a complementing-unit to, if the nozzle corresponding to the predetermined-cycle includes a discharging-defective-nozzle, complement the discharging-defective-nozzle with an alternative-nozzle near the discharging-defective-nozzle, wherein the complementing-unit determines a nozzle to be used for discharge so that there is at least one location where a cycle of nozzles applying a resin in the nozzle-array-direction is n−1 if the predetermined-cycle is n, and the resin is applied to another location in the predetermined-cycle n.

Imprint apparatus, method of controlling imprint apparatus, and storage medium

There is provided a liquid discharge apparatus. A discharge head is provided with a discharge port that discharges a liquid. A retention portion is facing the discharge head, and retains the liquid between the discharge head and the retention portion. A detection unit detects that the discharge port is covered with the liquid after the liquid is supplied between the discharge head and the retention portion.

Liquid discharge apparatus, imprint apparatus, and detection method

An imprint apparatus includes: a movable housing unit; an ejection head provided in the housing unit and configured to eject an ejection material; a flexible member provided in the housing unit and separating the housing unit into a first storing space communicating with the ejection head and storing the ejection material and a second storing space storing hydraulic liquid; a first channel and a second channel communicating with the second storing space; a pressure control unit configured to control a pressure in the second storing space through the channels; and a bubble detection unit configured to detect bubbles in the channels.

Imprint apparatus and method of controlling imprint apparatus

An imprint apparatus includes: a substrate stage configured to move a substrate; an ejection unit including a plurality of nozzles and configured to eject an ejection material from the nozzles onto the substrate in synchronization with movement of the substrate stage; and a mold driving mechanism configured to drive a mold on which a pattern is formed to press down the mold onto the substrate. The imprint apparatus determines a relative ejection timing of an abnormal nozzle with respect to a normal nozzle based on ejection properties of the nozzles and a moving direction of the substrate stage, determines an ejection timing of the normal nozzle based on the determined relative ejection timing, and controls a synchronization timing of the substrate stage and the ejection unit based on the determined ejection timing of the normal nozzle.

An ejection device is used for an imprint apparatus that presses a mold against an ejection material ejected onto a substrate to form a pattern. The ejection device includes: a housing unit having an ejection head configured to eject the ejection material onto the substrate, and housing configured to accommodate the ejection material; and a control unit configured to control processing of the ejection device. The control unit switches the processing according to a usage status of a consumable part included in the housing unit.

Ejection-material ejection device, information processing apparatus, and control method of ejection-material ejection device

Provided is an ejection apparatus including: an ejection head having an ejection opening for ejecting an ejection material in a liquid state; a storage container storing therein the ejection material and communicating with the ejection head; and a pressure control unit that maintains the pressure inside the storage container at a negative pressure. The pressure control unit generates a first pressure in the storage container in a normal operation, the first pressure being capable of forming a meniscus of the ejection material in the ejection opening. The pressure control unit drops the pressure inside the storage container to at least the first pressure in a case where the pressure inside the storage container reaches a predetermined pressure above the first pressure.

Ejection apparatus and imprint apparatus

Provided is an ejection device and an imprint apparatus which can suppress ejection failures and breakage of a mold. To achieve this, a circulation mechanism including a degassing unit is provided in an ejection head.

Ejection device and imprint apparatus

A liquid ejection device, a cleaning apparatus and a cleaning method for a module substrate, which can remove foreign matter on an ejection opening face and in a flow path connected with an ejection opening is provided. For that purpose, an ejection opening face is covered with liquid, cleaning is performed by driving a device configured to vibrate liquid, and after that the liquid is collected.

Liquid ejection device, cleaning apparatus and cleaning method for module substrate

An imprint apparatus comprises: a dispensing unit that dispenses a liquid to a substrate; a first measurement unit that measures a time from when a signal for causing the liquid to be dispensed is outputted to the dispensing unit until when the dispensed liquid passes through a predetermined position; a second measurement unit that measures a position of the liquid on the substrate that is dispensed by the dispensing unit; and a control unit that controls the measurement by the first measurement unit and the second measurement unit, wherein the control unit performs measurement by the second measurement unit based on a measurement result by the first measurement unit.

Liquid dispensing apparatus measuring condition of liquid and method of controlling the same, and imprint apparatus

An optical scanning apparatus includes a light source, a deflector, an optical member, a supporting portion, a casing, a cover member, a first air current deflecting portion configured to deflect, to a direction from the bottom toward the cover member, an air current generated by rotation of the rotatable polygonal mirror and flowing along a longitudinal direction of the optical member; and a second air current deflecting portion provided on the cover member and configured to deflect, to a direction crossing the longitudinal direction, the air current deflected by the first air current deflecting portion and flowing in the longitudinal direction.

Optical scanning apparatus and image forming apparatus

Imprint apparatus and method of controlling the same comprising a liquid position second measurement based on the timing measurement result by a first measurement

A light scanning apparatus including: a rotary polygon mirror configured to deflect a laser beam emitted from a light source; optical elements configured to guide the laser beam to a photosensitive member; a housing having a bottom surface and a side wall portion standing from the bottom surface and intersecting with a longitudinal direction of the optical elements; and a plurality of wall portions provided on the bottom surface so as to intersect with the longitudinal direction between the bottom surface and a lens of the optical elements that is closest to the rotary polygon mirror, the plurality of wall portions forming an air flow path for guiding an air flow caused by rotation of the rotary polygon mirror from a first space in which the rotary polygon mirror is arranged to a second space opposite to the first space with respect to the lens.

Light scanning apparatus, housing, and image forming apparatus

An X-ray imaging apparatus includes a multi X-ray source which includes a plurality of X-ray focuses to generate X-rays by irradiating X-ray targets with electron beams, a detector which detects X-rays which have been emitted from the multi X-ray source and have reached a detection surface, and a moving mechanism for moving the multi X-ray source within a plane facing the detection surface. The X-ray imaging apparatus acquires a plurality of X-ray detection signals from the detector by causing the multi X-ray source to perform X-ray irradiation while shifting the positions of a plurality of X-ray focuses which the detector has relative to the detection surface by moving the multi X-ray source using the moving mechanism. The apparatus then generates an X-ray projection image based on the plurality of X-ray detection signals acquired by the detector.

Multi X-ray imaging apparatus and control method therefor

An exposure apparatus of the present invention includes a vacuum container accommodating a structure, a vacuum pump configured to increase the degree of vacuum achieved inside the vacuum container, a radiation unit configured to perform a heat exchange through radiation for the structure, a temperature detecting unit configured to detect the temperature of the structure, and a control unit configured to control the radiation unit based on the detected temperature, wherein the radiation unit is arranged at a position determined so that the radiation unit does not interfere with a heat exchange achieved through radiation between the vacuum pump and the structure.

Growing community of inventors

Utsunomiya, Japan

Hisashi Namba