Kabushiki Kaisha Shinkawa

Hisashi Arai

Masayuki Shimura

Yoshiyuki Ogata

Masaki Okawara

Masaru Inomata

Nobuharu Moriya

A die bonding method and apparatus that performs bonding position detection and bonding inspection without lowering the productivity, in which after a bonding head has bonded a semiconductor chip to an island, the bonding head is moved to a wafer to pick up a semiconductor chip and is returned to the island; and during this period, an island used for bonding inspection (that is the island on which bonding has just been performed) and an island used for position detection (that is the island on which bonding is to be done next) are imaged by a camera in the same visual field, and inspection of the bonding conditions of the island used for inspection and detection of the position of the island used for position detection are performed based on the acquired image data.

Die bonding method and apparatus

A bonding device equipped with a heating block for heating, for instance, a lead frame upon which bonding is performed including vacuum suction nozzles, which are installed above the heating block so as to lift the lead frame, and an air-cylinder, which raises and lowers the vacuum suction nozzles. The lead frame is lifted from the heating block by the vacuum suction nozzles, thus being prevented from being overly heated by the heating block.

Bonding apparatus

A device for inspecting a high loop of a wire bonded on, for instance, a lead frame including a frame carrying stand, which guides and supports a lead frame, and an inspection roller, which is installed directly above the frame carrying stand. The inspection roller has frame pressing parts made as an insulating part so as to press the side portions of the lead frame against the frame carrying stand 31; and the inspection roller further has a wire detection part made as conductive parts provided between the frame pressing ring. A step or height difference between the frame pressing parts and the wire detection part is formed so as to be equal to the upper-limit value of the maximum height of wire loops formed by the bonded wire, and high loops that exceed the upper-limit value are detected by way of an electric current that flows when the wire detection part contacts the bonded wire.

Bonding wire height inspection device

A heating device used in a bonding apparatus including a cover which is provided on a heating body so as to cover a guide groove which guides lead frames; and gas grooves are formed in the heating body so as to run along the guide groove, and an inert gas is supplied into the gas grooves so that the inert gas prevents the entry of air from the joining surfaces of the heating body and cover.

Growing community of inventors

Akiruno, Japan

Hisashi Arai