Hitachi, Ltd.

Hisao Tadokoro

Kohji Maki

Houng Joong Kim

Hideki Shimane

Hitoshi Shibata

Yasuo Morooka

Keijiro Sakai

Keijirou Sakai

Takashi Kobayashi

Takeo Morimoto

Yasunori Sannohe

Hiroshi Ueno

Isamu Numata

The conventional linear drive apparatus has the problem that in constructing a linear motor of a multiphase structure by connecting a plurality of armature units, the length of the armature becomes longer in proportion to the number of the phases, thus limiting the locations where the apparatus can be installed. The problem is solved by a linear drive apparatus comprising a plurality of armature unitsformed by a magnetic material on which a conductor coilis disposed, and an armature comprising an arrangement of the armature units. The armature unitscomprise a plurality of opposing portions having opposing magnetic pole teeth. The magnetic pole teeth of adjacent opposing portions are arranged in an interdigitated manner. A secondary memberis disposed between magnetic pole teeth of the opposing portions. The armature unitscomprise the coilarranged on opposite sides thereof in an alternating manner.

Linear drive apparatus having cores and coils which are positioned on opposite sides of the cores

In order to reduce load supported by a support mechanism for supporting a movable part so as to prevent the movable part from moving in a horizontal direction when stress is generated thereon in the horizontal direction, there is provided a drive unit including a primary side having a magnetic body around which a coil is wound, and a secondary side having a plurality of permanent magnets, the primary side including magnetic poles and step portions provided on the magnetic poles. The width of each step portion is smaller than the width of each permanent magnet.

Linear drive unit reducing stress generated in movable part in horizontal direction

Linear drive apparatus

A drive apparatus overcomes the problems of ensuring accurate mounting of a plurality of armature coils relative to a plurality of magnetic pole position detectors, limitations concerning the location for mounting, and the extension of primary-side length. The drive apparatus comprises a primary side including an arrangement of a plurality of armatures each having a core made of a magnetic material with coil windings. It also comprises a secondary side including a permanent magnet movably supported relative to the armatures via a gap. A magnetic pole position detector is disposed between adjacent armatures.

Drive apparatus and XY table utilizing the same

Disclosed herewith a compact linear motor provided with a plurality of magnetic pole teeth and used to increase the thrust force by canceling a magnetic attractive force working between the primary member and the secondary member. The linear motor comprises a primary member and a secondary member. The primary member includes cores formed with a magnetic material and an electromagnetic coil wound on the cores while the secondary member supported so as to be capable of moving relatively with respect to the primary member with a gap therebetween. In the linear motor, the coil that is wound commonly on the cores is also disposed between adjacent magnetic pole teeth.

Linear motor, its controlling method, and XY table

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Hitachi, Japan

Hisao Tadokoro