Central Glass Company, Limited

Hisaji Nakano

Minoru Aramaki

Shinsuke Nakagawa

Yasushi Kita

Akira Sakanoue

Takashi Suenaga

Kohzo Hakuta

Mitsuo Kodama

Yoshiyuki Kobayashi

Tamio Nakamura

Shiro Moroi

Shirou Moroi

Masahiro Tainaka

Masahiro Kubo

Tetsuo Ueda

Hiroyuki Kurashige

Hiroshi Ichimura

Takashi Suen A

Nobuhiko Matsuoka

The present invention relates to a method for decomposing any of chlorocarbons, chlorofluorocarbons, perfluorocarbons and SF.sub.6 contained in a gas. This method includes the step of bringing the gas into contact, at a temperature of at least 300.degree. C., with a first mixture consisting essentially of 0.05-40 wt % of potassium hydroxide and at least one compound selected from the group consisting of alkali-earth-metal oxides and alkali-earth-metal hydroxides, for decomposing the at least one halide compound. When the halide compound-containing gas further contains oxygen, this gas may be brought into contact, at a temperature of at least 500.degree. C., with at least one first substance selected from the group consisting of active carbon, iron powder and nickel powder, for removing the oxygen from the gas, prior to the halide compound decomposition. When the halide compound-containing gas still further contains a strong oxidizing gas (e.g., fluorine), this gas may be brought into contact, at a temperature of at least 300.degree. C., with at least one second substance selected from the group consisting of Si, Ti, Ge, W, Mo, Fe, Mn, Co, Zn, Sn, B, Zr and compounds of these elements, except oxides of these elements, such that the oxidizing gas turns into a compound that is not reactive with the at least one first substance. According to this method, it is possible to decompose halide compounds contained within a gas, using a smaller equipment, at a lower temperature, as compared with conventional methods.

Method for decomposing halide-containing gas

The concentration of molecular fluorine in a mixed gas such as an excimer laser gas can be determined easily, quickly and accurately by passing the mixed gas through a column packed with an alkali metal or alkaline earth metal compound which has no halogen atom and reacts with fluorine to form a solid fluoride together with molecular oxygen and/or carbon dioxide and measuring the concentration of oxygen or carbon dioxide in the fluorine-free gas flowed out of the packed column. If the mixed gas initially contains molecular oxygen or carbon dioxide, its concentration is measured separately after fixing fluorine in another column packed with an element which forms a fluoride. This analyzing method can be used in a feedback control system for controlling the concentration of fluorine in an excimer laser gas during operation of the laser to thereby stabilize the laser output power.

Method and apparatus for analyzing fluorine containing gases

The concentration of molecular fluorine in a mixed gas such as an excimer laser gas can be determined easily, quickly and accurately by passing the mixed gas through a column packed with an alakli metal or alkaline earth metal compound which has no halogen atom and reacts with fluorine to form a solid fluoride together with molecular oxygen and/or carbon dioxide and measuring the concentration of oxygen or carbon dioxide in the fluorine-free gas flowed out of the packed column. If the mixed gas initially contains molecular oxygen or carbon dioxide, its concentration is measured separately after fixing fluorine in another column packed with an element which forms a fluoride. This analyzing method can be used in a feedback control system for controlling the concentration of fluorine in an excimer laser gas during operation of the laser to thereby stabilize the laser output power.

Method for analyzing fluorine containing gases

A laser gas used in a rare gas fluoride excimer laser is efficiently refined with little loss of the principal rare gas such as Ar, Kr or Xe by sequential contact of the laser gas first with a reactive metal, e.g. Si or Fe, for conversion of the fluorine source gas such as F.sub.2 or NF.sub.3 to a metal fluoride, then with a solid alkaline compound, e.g. Ca(OH).sub.2, for conversion of gaseous fluorides to solid metal fluorides, next with zeolite which is adsorbent of most of the remaining impurities and finally with an alkaline metal, e.g. Ca or Na, for decomposition of CF.sub.4 to form a solid metal fluoride and carbon. CF.sub.4 is formed during operation of the excimer laser by reaction of fluorine with a fluororesin used as electrical insulator in the laser apparatus, and accumulation of CF.sub.4 in the laser gas caused significal lowering of the laser output power.

Method of refining rare gas fluoride excimer laser gas

In forming a coating film of a fluororesin, e.g. polytetrafluoroethylene, on a metallic or nonmetallic surface by a physical vapor deposition technique, problems attributed to the necessity of intensely heating or bombarding the fluororesin as the evaporating source or target material are solved by using a molecular weight reduced fluororesin not higher than 5000 in molecular weight. It is best to use a low molecular weight fluororesin powder obtained by heating a high molecular weight fluororesin in presence of a fluorine source and precipitating the molecular weight reduced polymer from the reaction gas.

Method of forming coating film of fluororesin by physical vapor

A method of preparing graphite fluoride such as (CF).sub.n or (C.sub.2 F).sub.n by heterogeneous contact reaction between a carbon material such as graphite or petroleum coke and fluorine gas at about 200.degree.-550.degree. C. In the gas phase of the reaction system, the total concentration of higher fluorocarbons having more than four carbon atoms formed by side reactions is controlled so as not to become above 3% by volume by, for example, condensation or catalytic decomposition of at least a portion of the higher fluorocarbons in the gas flowed out of the reaction chamber for recirculation. Such control is highly effective for prevention of rapid and violent decomposition of the graphite fluoride existing in the solid phase of the reaction system induced by sudden decomposition of the higher fluorocarbons in the reaction system to lower fluorocarbons.

Method of safely preparing graphite fluoride

NF.sub.3 is prepared with good yields by reaction between fluorine gas and an ammonium complex of a metal fluoride, such as (NH.sub.4).sub.3 AlF.sub.6, in solid phase. The metal flouride ammonium complex may be one additionally containing an alkali metal, such as (NH.sub.4).sub.2 NaAlF.sub.6. The gas-solid reaction is carried out preferably at temperatures above 80.degree. C. and at relatively low partial pressures of fluorine in the gas phase of the reaction system, so that the reaction is easy to control.

Process of preparing nitrogen trifluoride by gas-solid reaction

A lubricant comprising a partially defluorinated graphite fluoride obtained by exposing a dispersion of raw material graphite fluoride to electromagnetic radiation, followed by the separation of the resulting partially degraded graphite fluoride. The partially defluorinated graphite fluoride is not only excellent in lubricating properties but also has excellent compatibilities with resins, greases and oils. The excellent compatibilities of the partially defluorinated graphite fluoride are effective in preventing the unfavorable deposition of the graphite fluoride in a liquid lubricant composition and advantageously lead to improvement in the moldability of any graphite fluoride-resin composition, thereby enabling the ultimate composition to exhibit excellent lubricating properties.

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Ube, Japan

Hisaji Nakano