Tokyo Electron Limited

Hirozumi Hoshino

Keiji Onzuka

Hideaki Sato

Kazuyoshi Eshima

Hiromi Hara

Kouki Murakami

A substrate aligning method includes receiving a substrate by moving a substrate support from an outside of an outer periphery toward a central portion of the substrate along the substrate; and aligning the substrate such that the substrate support moves from a position different from a position partially upwardly warped along an outer peripheral edge of the substrate and a position partially downwardly warped along the outer peripheral edge of the substrate toward the central portion of the substrate so as to receive the substrate.

Substrate aligning method, substrate receiving method, substrate liquid processing method, substrate aligning apparatus, substrate receiving apparatus, substrate liquid processing apparatus, and substrate processing system

A substrate processing apparatus includes a processing section that performs a batch process to a plurality of substrates. A first substrate transport mechanism removes one of substrates contained in a substrate container placed on a stage, and transport the substrate to a position adjusting unit, in which the position of the substrate in the rotating direction of the substrate is adjusted, and transports the substrate back to the substrate container. Then a second substrate transport mechanism collectively removes from the substrate container the substrates whose positions in the rotating direction have been adjusted by the position adjusting unit.

Substrate processing apparatus

An ultrasonic cleaning apparatus according to the present invention comprises a plurality of cleaning tanks configured to store a cleaning liquid, an object-to-be-processed holder capable of being inserted into each cleaning tank, the object-to-be-processed holder being configured to hold an object to be processed and to immerse the object to be processed into the cleaning liquid, a vibrator disposed on each cleaning tank, a single ultrasonic oscillator configured to make each vibrator ultrasonically vibrate, an output switch interposed between the ultrasonic oscillator and the vibrator of each respective cleaning tank, the output switch being configured to switch the vibrator that is connected to the ultrasonic oscillator, and a control device configured to control the ultrasonic oscillator and the output switch, wherein the control device controls the ultrasonic oscillator and the output switch such that a timing at which the vibrator of one of the cleaning tanks is made to ultrasonically vibrate, and a timing at which the vibrator of another cleaning tank is made to ultrasonically vibrate are not overlapped with each other.

Growing community of inventors

Koshi, Japan

Hirozumi Hoshino