Canon Kabushiki Kaisha

Hiroyuki Yuuki

Takashi Kato

Yuhei Sumiyoshi

Takumi Tokimitsu

A detection apparatus which illuminates a sample and detects light reflected by the sample, comprises a light source, a columnar reflecting member having a columnar reflecting surface which reflects light having entered a first end of the columnar reflecting member by a plurality of number of times, and emits the light from a second end of the columnar reflecting member, a mirror which reflects light radiated by the light source so as to guide to the first end and a detector, wherein the sample is illuminated with the light emitted from the second end, and the detector is configured to detect the light which has been reflected by the sample and has passed through the columnar reflecting member, and a reflecting surface of the mirror is a concave surface, and a shape of a reflecting surface of the mirror on a section perpendicular to an axis of the columnar reflecting member is concave.

Detection apparatus

The present invention provides a projection optical system for projecting a pattern of an object plane onto an image plane, including a first lens whose refractive index irreversibly increases by ultraviolet irradiation, and a second lens whose refractive index irreversibly decreases by the ultraviolet irradiation.

Projection optical system with rarefaction compensation

At least one exemplary embodiment is directed to a projection optical system that projects an image of a pattern of a first object onto a second object includes a first image forming optical system, a second image forming optical system, and a light-shielding member. The first image forming optical system forms an intermediate image of the pattern, and includes a concave mirror and a reflecting mirror. The concave mirror has a reflecting surface opposing the second object. The reflecting mirror directs light from the first object to the concave mirror. The second image forming optical system forms an image of the intermediate image onto the second object, and includes a lens. The light-shielding member is disposed between the concave mirror and the lens.

Projection optical system

The present invention provides a projection optical system which projects an image on a first object plane onto a second object plane, comprising at least four optical members which are arrayed in turn from the second object plane, and made of an isotropic crystal, wherein the at least four optical members are formed by alternately arraying optical members in each of which a &#x3c;1 1 1&#x3e; crystal axis is oriented along a direction of an optical axis, and optical members in each of which a &#x3c;1 0 0&#x3e; crystal axis is oriented along the direction of the optical axis.

Growing community of inventors

Utsunomiya, Japan

Hiroyuki Yuuki