Dainippon Screen Mfg. Co., Ltd.

Hiroyuki Tsujino

Eiji Miyasaka

Morihiro Takeda

Masayuki Handa

Tatsuhiko Inada

A variety of maintenance work is performed for each of operation units in a substrate processing apparatus. Doors are provided at given positions on sides of an apparatus space, each of which is provided with an interlock switch. An interlock release unit is provided near each of the doors for disabling the function by the interlock switch, and for placing a specific operation unit of the operation units in the apparatus space in an off state, while holding the other operation units in an on state. Re-operation instruction units are provided at given positions on the sides of the apparatus space for placing the specific operation unit in an on state that has been placed in an off state by the manipulation of the interlock release unit.

Substrate processing apparatus and management method

The invention provides an apparatus for processing silver salt photosensitive material with a small amount of processing solution. The processing solution uniformly reacts with the photosensitive material for maintaining high processing quality. The apparatus of the invention includes: a process tank 96 which is relatively small in volume; and a developer supply roller 98 which is partly soaked in the processing solution. New or unused developer is temporarily stored in a temporary reservoir 100 formed on the circumference of the roller, held in pores of sponge formed on the surface of the developer supply roller, and supplied to an inlet of photosensitive material PM in the process tank 96 with rotation of the roller 98. The new processing solution is uniformly diffused, along the width of the photosensitive material PM, in the vicinity of the inlet in the stored processing solution. Accordingly, the photosensitive material PM is evenly and efficiently processed. The invention allows smaller equipment as well as improvement of processing quality. Furthermore, the smaller volume of processing solution prevents accumulation of sludge, thus saving time and labor for maintenance.

Method and apparatus for processing photosensitive material

A reproduction magnification of an image to be reproduced is inputted through a inputting device. A projection optical system is adjusted according to the reproduction magnification, and then projects image light reflected from an original in the form of a slit onto a photosensitive material sheet. As projecting the slit image light, the original and the photosensitive material sheet are synchronously fed each other.

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Hikone, Japan

Hiroyuki Tsujino