Shimadzu Corporation

Other

Tohoku University

Jeol Ltd.

Japan Atomic Energy Agency

Ntt Advanced Technology Corporation

National Institutes for Quantum and Radiological Science and Technology

Hiroyuki Sasai

Hideyuki Takahashi

Shinya Morita

Hitoshi Ohmori

Yutaka Yamagata

Sei Moriyasu

Masami Terauchi

Masato Koike

Masaru Kawata

Hidetaka Kira

Katsuhiko Kada

Takashi Imazono

Masatoshi Hatakeyama

Masahiko Ishino

Hisataka Takenaka

Nobuyuki Iwai

An irradiation regionof a diffraction gratingincludes a first irradiation region (A) and a second irradiation region (B). In the diffraction grating, a blaze wavelength of a grooveof the first irradiation region (A) is different from a blaze wavelength of a grooveof the second irradiation region (B). That is, the first irradiation region (A) and the second irradiation region (B) have different relationships between a wavelength of light to be spectrally dispersed and a diffraction efficiency. Therefore, in a spectral device, light on a short wavelength side of light reflected by the second irradiation region (B) of the diffraction gratingis not diffracted and is not received by a detector. Then, in a spectral device, aberration on the short wavelength side is corrected. In this way, in the diffraction grating, an aberration can be corrected with a simple structure in which the grooves () are formed such that the blaze wavelengths in the first irradiation region (A) and the second irradiation region (B) are different from each other.

Diffraction grating and spectral device

An object is to provide a blazed diffraction grating having a smaller blaze angle than an existing blaze angle, and a method for producing the same. A method for producing a blazed diffraction grating includes the steps of forming a resin layer on a support having a saw-tooth sectional shape and having a surface on which a basic blaze surface and a basic riser surface are arranged alternately and repeatedly in a direction, such that the thickness of the resin layer contacting with the surface monotonically changes in the direction, and forming a metal coating film covering the resin layer surface. The method for monotonically changes the thickness comes in a formation method by difference in volatilization volume after applying a solvent resin on the support, and a formation method by a centrifugal force.

Blazed diffraction grating and method for producing blazed diffraction grating

To cover a wide wavelength bandwidth, a spectroscopic apparatus uses three varied line spacing concave diffraction gratings Gto G, the corresponding energy ranges for G, G, and Gbeing 50 to 200, 155 to 350, and 300 to 2200 eV, respectively. In the respective wavelength ranges, the diffraction conditions are satisfied. To provide a high throughput and a high resolution in the respective wavelength regions, the incident angles &#x3b1;to &#x3b1;for Gto Gmeasured from the normal line of the diffraction grating are specified to be &#x3b1;&#x3c;&#x3b1;&#x3c;&#x3b1;. Presupposing the normal lines of all diffraction gratings are superposed upon a common normal line, in order to meet &#x3b1;&#x3c;&#x3b1;&#x3c;&#x3b1;, the center positions &#x394;to &#x394;for Gto Gare set on the normal line (as &#x394;&#x3c;&#x394;&#x3c;&#x394;). From Gto G, one diffraction grating can be selected.

Spectroscopic apparatus

An arrangement is made such that the magnitude of cure shrinkage obtained by multiplying the thickness of a resin layerbetween a master moldand a negative mold substrateby the cure shrinkage ratio of the resin and the magnitude of cure shrinkage obtained by multiplying the thickness of a resin layerbetween the negative moldand the surface of the spherical or flat substrateby the cure shrinkage ratio of the resin can be compensated for by each other. In accordance with this method, an aspherical optical element having a higher precision than ever can be formed at reduced cost by a replica method involving the addition of a resin layer to the surface of a spherical or flat substrate.

Method for forming aspherical optical element

An electrolytic in-process dressing device is provided with a disk-shaped metal-bonded grindstone with a surface with a circular arc shape with a radius R at its outer periphery and a numerical control device . The disk-shaped metal-bonded grindstone rotates around an axis Y, and the grindstone is dressed electrolytically while the device grinds the workpiece . The numerical control device is provided with a rotary truing device that rotates around the X axis that orthogonally crosses the axis of rotation Y and trues the circular arc surface , a shape measuring device for measuring the shape of the circular arc surface of the grindstone and the shape of the processed surface of workpiece on the machine, and controls the grindstone numerically in the three directions along the axes X, Y and Z. The numerical control device moves the grindstone in three axial directions and repeats the operations of truing, grinding and measurements on-line. Thus, an axially asymmetrical aspheric mirror with a highly accurate shape and extremely low surface roughness, that can precisely reflect or converge light can be manufactured within a short time with a high accuracy.

Method of grinding an axially asymmetric aspherical mirror

Growing community of inventors

Kyoto, Japan

Hiroyuki Sasai