Shibaura Mechatronics Corporation

Toshiba Ceramics Co., Ltd.

Covalent Materials Corporation

Hiroyuki Naraidate

Yoshinori Hayashi

Koji Izunome

Hiromichi Isogai

Kazuhiko Hamatani

Miyuki Shimizu

Hiroaki Yuda

Atsushi Tanabe

Makoto Kyoya

Hiromi Nagahama

A surface inspection apparatus, for inspecting a plurality of surfaces formed in a peripheral edge portion of a plate-like object, includes a image pickup mechanism, which photographs the peripheral edge portion of the plate-like object having a plurality of surfaces, and an image processing device, which processes an image obtained by the photographing device. The image pickup mechanism includes an optical system which guides images of the plurality of surfaces of the plate-like object in one direction, and a camera unit having an image pickup surface, on which the images of the plurality of surfaces guided by the optical system in the one direction are formed.

Surface inspection apparatus and surface inspection method

A wafer inspection apparatus has a supporting means () for rotatably supporting a wafer (W) formed of a disk, a circumferential edge imaging means () for imaging a circumferential edge (S) of the wafer (W) that is supported by the supporting means for rotation, a notch imaging means () for imaging a notch (N), a notch illumination part () for illuminating the notch (N), and a control means () for processing image data imaged by the circumferential edge imaging means () and the notch imaging means (). The circumferential edge imaging means () has a plurality of imaging cameras () for imaging a plurality of different parts in a thickness direction of the circumferential edge of the wafer (W). The different parts of the circumferential edge (S) of the wafer (W) include an apex at right angles to a surface of the wafer (W) and a front side bevel and a back side bevel inclined relative to the apex. The notch imaging means () for the wafer (W) having the notch (N) has a plurality of imaging cameras () for imaging different parts in the thickness direction of the notch (N).

Wafer inspection apparatus

Growing community of inventors

Iwate-ken, Japan

Hiroyuki Naraidate