Toray Engineering Company, Limited

Petoca, Ltd.

Hiroyuki Nakagawa

Masaki Mori

Toshifumi Kawamura

Tomiji Hosotsubo

Kouichi Miura

A laser exposure apparatus including a laser oscillator ( ) for oscillating laser beam having a circular section, a beam expander ( ) for enlarging the laser beam oscillated from the laser oscillator, a square mask ( ) for shaping the laser beam having the circular section enlarged by the beam expander into a square section and an optical system for contracting the laser beam formed into the square section by the square mask. Even when a very small identification code is attached to a wafer, the identification code can be marked to improve reading recognizability of the identification code.

Laser exposure apparatus

A process for producing an activated carbon fiber molding is disclosed which comprises spinning an isotropic pitch to thereby obtain pitch fibers, infusibilizing the pitch fibers to thereby obtain infusibilized fibers, heating the infusibilized fibers under a mechanical load to thereby obtain a molding and activating the molding. In this process, the infusibilized fibers and/or infusibilized fibers molding may be heated in an inert atmosphere so as to effect a light carbonization thereof and thereafter subjected to the subsequent step of the process. The pitch-based porous activated carbon fiber molding obtained by this process has a strikingly high bulk density and can sufficiently exhibit the specific properties of the activated carbon fiber, e.g. a large specific surface area, to thereby have a high adsorption efficiency.

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Kyoto, Japan

Hiroyuki Nakagawa