Nuflare Technology, Inc.

Mitsubishi Electric Corporation

Mitsubishi Denki Kabushiki Kaisha

Kabushiki Kaisha Toshiba

Kabushiki Kaisha Topcon

Plus Corporation

Advanced Mask Inspection Technology Inc.

Hiroyuki Nagahama

Riki Ogawa

Soichi Nagano

Takeshi Fujiwara

Koji Nakajima

Jun Ido

Noboru Kobayashi

Hayato Horie

Masayuki Hideshima

Mitsuru Takeuchi

Eiji Arita

Takayuki Endo

Hideyuki Kitamura

Takanori Kawai

Tomohiro Nakamura

A displacement measuring apparatus includes an illumination system to obliquely irradiate the target object surface with beams, a sensor to receive a reflected light from the target object surface, an optical system to diverge the reflected light in a Fourier plane with respect to the target object surface, a camera to image a diverged beam in the Fourier plane, a gravity center shift amount calculation circuitry to calculate a gravity center shift amount of the reflected light in the light receiving surface of the sensor, based on a light quantity distribution of the beam imaged by the camera, and a measurement circuitry to measure a heightwise displacement of the target object surface by an optical lever method, using information on a corrected gravity center position obtained by correcting the gravity center position of the reflected light received by the sensor by using the gravity center shift amount.

Displacement measuring apparatus, electron beam inspection apparatus, and displacement measuring method

Correction tool

An illumination apparatus comprising, a light source that emits a laser beam, a lens array on which the laser beam is illuminated, a plurality of element lenses having a diameter greater than or equal to the laser beam are arranged in the lens array, the lens array being rotatable around an optical axis of the laser beam, wherein the two lens arrays are arrayed in an optical axis direction of the laser beam, and the element lenses in each lens array are arranged such that a boundary between the element lenses adjacent to each other radiates from a rotation center of the lens array and a direction in which the element lens of one of the lens arrays traverses the optical axis of the laser beam is orthogonal to a direction in which the element lens of the other lens array traverses the optical axis of the laser beam.

Illumination apparatus and inspection apparatus

In a focal position adjusting method for an inspection apparatus, the inspection apparatus includes an illumination optical system and an imaging optical system configured to perform a defect inspection of a pattern formed in a sample using an image imaged on a first sensor. The focal position adjusting method includes illuminating the light from the first light source on the sample after transmitting the light through a first slit disposed in the illumination optical system. The light from the first light source is condensed into a second sensor disposed in the imaging optical system. A light intensity distribution of a pupil of the illumination optical system is observed. The focal position of the illumination optical system is adjusted by obtaining each light quantity of the front focus and the rear focus of the image of the first slit projected on the sample based on the light intensity distribution.

Focal position adjustment method and inspection method

When a decision is made that receiving performance deterioration due to an interfering wave is present in a digital broadcasting wave, an operating point of an RF AGC amplifierand a time constant of gain control of the RF AGC amplifierare altered.

Digital broadcast receiver

A luminous flux branching element includes a transparent base member arranged diagonally to an optical axis and having an incidence plane and an emission plane parallel to each other. Incident light from the incidence plane is split into a main luminous flux emitted from an emission position on the emission plane and a branched luminous flux emitted from a branch position apart from the emission position and having a smaller light quantity than of the main luminous flux. A reflecting member is arranged on the incidence plane to cause the incidence plane to reflect reflected light from the emission plane. A non-coat region in which antireflection-treatment is not performed is formed in a region of the emission plane where the incident light from the incidence plane is reached, and antireflection-treatment is performed in the emission plane excluding the non-coat region and the incidence plane.

Luminous flux branching element and mask defect inspection apparatus

A digital broadcasting receiving apparatus is characterized in that the digital broadcasting receiving apparatus is provided with an antenna combination determination processing unit for selecting at least two antennas from among a plurality of antennas which have directivities in different directions and each of which receives a digital broadcasting wave transmitted from outside the digital broadcasting receiving apparatus, and for providing an instruction for switching among the above-mentioned plurality of antennas on the basis of a state of reception of the digital broadcasting waves received by the selected antennas, and switches for switching among the above-mentioned plurality of antennas according to the instruction from the above-mentioned combination determination processing unit.

Digital broadcasting receiving apparatus

A receiving apparatusincludes a stereo blend control unitfor carrying out a stereo blend process according to the reception state of a broadcast wave, a pilot detecting unitfor detecting a pilot signal included in the broadcast wave, and a high cut control unitfor carrying out high cut control according to the reception state of the broadcast wave and for carrying out the high cut control when the pilot signal is not detected by the pilot detecting unit.

Receiving apparatus

A receiver accepts a digital signal having an upper side digital signal located in a higher frequency range on a frequency axis than an analog signal, and a lower side digital signal located in a lower frequency range on the frequency axis than the analog signal. A BPF () allows the analog signal to pass therethrough and a BPF () allows the analog signal and the digital signal to pass therethrough. BPFs () and () accept the output of the BPF () and output the upper side digital signal and the lower side digital signal, respectively. A digital receive level determining unit () and a selection SW () select either of the outputs of the BPFs () and () according to the receive levels of the upper side digital signal and the lower side digital signal, and output the selected output as a selected signal. The receiver then demodulates this selected signal.

Receiver

A device for measuring the intensity of incoming light is disclosed. This device includes a rotatable light blocking unit which interrupts incident signal light at short regular intervals. The device also includes a light source which emits certain light different from the signal light while the signal light is interrupted by the block unit, and a measurement unit for measuring intensity values of the signal light and the certain light. A correction unit is provided for correcting the measured signal light intensity based on the certain light intensity. A calculator unit calculates a correction value through comparison of the intensity of the certain light to a reference value. The correction unit uses this correction value to correct the signal light intensity.

Light amount measurement device and light amount measurement method

A receiver includes an FFT analysis result/group delay characteristic determining unit for determining whether or not a group of carrier signals of a digital broadcasting signal satisfies predetermined requirements, and delivers a requirement satisfaction determination signal indicating the determining result. When receiving the requirement satisfaction determination signal indicating that the group of carrier signals doesn't satisfy the predetermined requirements while the receiver is selectively receiving the digital broadcasting signal, a switching circuit switches to the reception of an analog broadcasting signal. In contrast, when receiving the requirement satisfaction determination signal indicating that the group of carrier signals satisfies the predetermined requirements while the receiver is selectively receiving the analog broadcasting signal, the switching circuit switches to the reception of the digital broadcasting signal.

Growing community of inventors

Tokyo, Japan

Hiroyuki Nagahama