Nec Corporation

Hitachi High-tech Science Corporation

Hiroyuki Mutoh

Yoshimi Kawanami

Shinichi Matsubara

Tomokazu Kozakai

Masato Iwakawa

Hironori Moritani

Yoko Nakajima

Tomoaki Fukano

A method of manufacturing an emitter is disclosed. The method enables a crystal structure of the tip of the front end of the emitter to return to its original state with high reproducibility by rearranging atoms in a treatment, and enables a long lasting emitter to be attained by suppressing extraction voltage rise after the treatment. As a method of manufacturing an emitter having a sharpened needle-shape, the method includes: performing an electropolishing process for the front end of an emitter material having conductivity to taper toward the front end; and performing an etching to make the number of atoms constituting the tip of the front end be a predetermined number or less by further sharpening the front end through an electric field-induced gas etching having constantly applied voltage, while observing the crystal structure of the front end, by a field ion microscope, in a sharp portion having the front end at its apex.

Method of manufacturing emitter, emitter, and focused ion beam apparatus

A label/window position detecting device includes a conveyor, light-emitting elements, a lens, linear image sensors, image processors, and coordinate calculation units. The conveyor conveys a target object having a label/window. The light-emitting elements illuminate the target object which is being conveyed by the conveyor. The lens forms an image of the target object illuminated with the light-emitting elements. The linear image sensors photoelectrically convert image light incident through the lens into image signals. The image processors binarize the image signals obtained from the linear image sensors into monochrome binary image signals, using a predetermined threshold. The coordinate calculation units calculate a label/window position of the target object on the basis of the binary image signals from the image processors, which correspond to a label/window edge portion. A method of detecting a label/window position is also disclosed.

Label/window position detecting device and method of detecting

Growing community of inventors

Tokyo, Japan

Hiroyuki Mutoh