Hamamatsu-photonics K.k.

Hiroyuki Matsuura

Hirotoshi Terada

Tomonori Nakamura

Chiyoharu Horiguchi

Hideo Hiruma

Shigeo Takahashi

Hirotaka Nonaka

Tetsuo Amano

Koji Watase

Provided is a cooling unit to be used in an inspection of a semiconductor device. The cooling unit includes a jacket for dissipating heat of the semiconductor device. The jacket is provided with a light passing portion for passing light from the semiconductor device. The jacket has a space defining surface that faces the semiconductor device and defines a space between the space defining surface and the semiconductor device in a state where the light passing portion faces the semiconductor device. The jacket is provided with a supply flow path through which a fluid to be supplied to the space flows.

Cooling unit, objective lens module, semiconductor inspection device, and semiconductor inspection method

A suction unitincludes a main body portion having a first surfaceon which a semiconductor wafer W is arranged and a second surfaceopposite to the first surface, and in which a through-holethat penetrates through the first surfaceand the second surfaceis formed and a light transmitting portion having a light incident surfaceand a light emitting surface, and which is fitted to the through-hole. Further, in the first surface, a first suction groovefor vacuum sucking the semiconductor wafer W to fix the semiconductor device D to the light incident surfaceis formed, and in the second surface, a second suction groovefor vacuum sucking the solid immersion lens S to fix the solid immersion lens S to the light emitting surfaceis formed.

Suction apparatus, semiconductor device observation device, and semiconductor device observation method

A three-dimensional shape measuring apparatus includes a moving frame arranged to surround a measurement space. The moving frame is arranged to be movable in a vertical direction. A plurality of sensors is disposed opposite to each other on two opposite sides of the moving frame and are arranged to effect a horizontal scanning of light to measure distances to a human body being measured. A driving mechanism moves the moving frame. An analyzer calculates distances to the human body, based on output signals from respective sensors, to analyze data of a surface position of the human body, i.e., a three-dimensional shape thereof. The apparatus further includes a placement state on which the human body is placed. Since the sensors are located so as to face the front and the back of the human body, the apparatus can also measure portions below an armpit and below a crotch.

Three-dimensional scanner utilizing moving frame with detectors

Growing community of inventors

Hamamatsu, Japan

Hiroyuki Matsuura