Nikon Corporation

Hiroyuki Matsushiro

Tetsuji Onuki

Masatoshi Suzuki

Hideaki Ohkubo

Toru Fujii

Yasushi Fukutomi

Masaya Miyazaki

Tatsuro Ohtaki

A high resolution scanning probe type microscope capable for simultaneous observation of the optical images of a sample and the probe tip. The microscope has a construction in which the probe and the optical microscope are supported with separate supporting members and the probe is disposed inside the visual field of the optical microscope. The supporting members of the probe and the optical microscope are installed on a vibration-proof table, and the supporting member for the probe has a double-end-supported type beam construction.

Scanning probe type microscope apparatus

A compound type microscope is provided which can observe the measurement sample of an atomic force microscope (AFM) by means of an optical microscope. This compound type microscope is comprised of an optical microscope having an objective and an observation optical system, a cantilever having a reflecting surface and detecting an atomic force, an irradiating optical system for applying a spotlight to the cantilver, a detector for detecting the displacement of reflected light caused by the displacement of the cantilever, and a sample stage for placing a sample thereon. The arrangement can be designed to accommodate the use of a scanning tunnel type microscope (STM) interchangeably with the AFM so that the sample can be measured by the STM instead of by the AFM. To this end, the probe of the STM can be detachably mountable coaxially with respect to the objective of the optical microscope, whereby the probe of the STM and the cantilever of the AFM can be selectively disposed below the objective.

Compound type microscope

A scanning probe microscope, capable of achieving a resolving power of atomic level, is provided with a probe microscope unit 5, 6, 17 for measuring a fine constitution of sample surface with a probe 5, and with an optical microscope unit 8, 10-16 for observing an optical image of sample, in which the probe microscope unit is encased in a box 9 shielded against external noises and electromagnetic waves. The box has a shape of a cone such as triangular cone, which is placed on a triangular surface plate.

Scanning probe microscope

A composite scanning tunneling microscope comprises a first objective optical system for collimating an optical flux from a sample, a second objective optical system for condensing the optical flux thus collimated, and a transparent member disposed between the first and the second objective optical systems. A through hole is perforated along an optical axis in the center of the first objective optical system. A tube scanner member has a probe for detecting a tunnel current disposed at one end thereof. The tube scanner member passes through the hole of the first objective optical system without a contact therewith. The other end of the tube scanner member is fixed to the transparent member. The tube scanner member fixed to the transparent member is separate from and independent of an optical microscope, so that a tunnel current may stably be detected without influences on the probe from vibrations of the optical microscope.

Growing community of inventors

Tokyo, Japan

Hiroyuki Matsushiro