Nara Institute of Science and Technology

Jeol Ltd.

National University Corporation Nara Institute of Science and Technology

Hiroyuki Matsuda

Masato Kudo

Hiroshi Daimon

Fumihiko Matsui

Laszlo Toth

Makoto Kato

Provided is a compact device which captures, over a large solid angle range, electrically charged particles emitted from a point source and parallelizes the trajectories of said charged particles. The present invention is configured from: an electrostatic lens comprising a plurality of axisymmetric electrodes (-) and an axisymmetric aspherical mesh () which has a surface that is concave away from the point source; and a flat collimator plate () positioned coaxially with the electrostatic lens. The acceptance angle for the electrically charged particles generated from a point source () is &#xb1;30&#xb0; or greater. The shape of the aspherical mesh (), and the potentials and the positions of a ground electrode () and application electrodes (-) are adjusted so that the trajectories of the electrically charged particles are substantially parallelized by the electrostatic lens. The electrostatic lens and the flat collimator plate are positioned on a common axis.

Electrostatic lens, and parallel beam generation device and parallel beam convergence device which use electrostatic lens and collimator

A mesh (M) having an ellipsoid shape or a shape close to the ellipsoid shape is attached to an electrode (EL) among electrodes (ELto ELn). Voltages of the later-stage electrodes (ELto ELn) are appropriately set. With this arrangement, a local negative spherical aberration generated by the mesh (M) is cancelled out with a positive spherical aberration. This optimizes an electric field distribution. As a result, this realizes an electrostatic lens whose acceptance angle is extended to about &#xb1;60&#xb0;.

Spherical aberration corrected electrostatic lens, input lens, electron spectrometer, photoemission electron microscope and measuring system

Growing community of inventors

Aioi, Japan

Hiroyuki Matsuda