Canon Kabushiki Kaisha

Zacros Corporation

Hiroyuki Matsuda

Toshiki Iwai

Tomokazu Taki

Provided is a detection apparatus having a high detection accuracy. A detection apparatus comprises an optical element arranged at a position optically conjugate to a target surface, including a first region for forming illumination light that illuminates the target surface with a first angle distribution and a second region for forming illumination light that illuminates the target surface with a second angle distribution, a measurement mark arranged at the target surface; and a detector for detecting a deviation direction and a deviation amount of the optical element based on reflection light from the measurement mark illuminated by the first region and the second region of the optical element.

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Tokyo, Japan

Hiroyuki Matsuda