Hamamatsu-Photonics K.k.

Hamamatsu Photonics Kabushiki Kaisha

Fuji Photo Film Company, Limited

Research Development Corporation of Japan

Hiroyuki Kyushima

Hideki Shimoi

Akira Atsumi

Masuo Ito

Yutaka Hasegawa

Suenori Kimura

Keisuke Inoue

Eiichiro Kawano

Koji Nagura

Masuya Mizuide

Tomihiko Kuroyanagi

Hiroyuki Sugiyama

Akihiro Kageyama

Hitoshi Kishita

Takayuki Ohmura

Motohiro Suyama

Tomoyuki Okada

Yasuharu Negi

Atsuhito Fukasawa

Yasuyuki Egawa

Yoshihiko Kawai

Yuji Masuda

Atsushi Uchiyama

Kimitsugu Nakamura

Keisuke Araki

Tsuyoshi Kodama

Yousuke Oohashi

Takashi Nakamura

Satoshi Arakawa

Tetsuya Morita

Shinichi Muramatsu

Koichiro Oba

Makoto Nakamura

Shirou Sakai

Toshimitsu Nagai

Hiroshi Suzuki

Junichi Takeuchi

Takahito Kato

Hisaki Katoh

Takayuki Omura

Kazuhiro Hara

Hiroto Yokota

Kazunori Wada

Kazumi Yamashita

Kazuyoshi Okano

Yasuhara Negi

Katsuma Nagai

Hideki c/o Hamamatsu Photonics KK Shimoi

The present invention relates to an electron multiplier and others to effectively suppress luminescence noise, even in compact size, in which each of multistage dynodes has a plurality of columns each having a peripheral surface separated physically, and in which each column is processed in such a shape that an area or a peripheral length of a section parallel to an installation surface on which the electron multiplier is arranged becomes minimum at a certain position on the peripheral surface in the column of interest.

Electron multiplier and photomultiplier including the same

The present invention relates to a photomultiplier having a structure for making it possible to easily realize high detection accuracy and fine processing, and a method of manufacturing the same. The photomultiplier comprises an enclosure having an inside kept in a vacuum state, whereas a photocathode emitting electrons in response to incident light, an electron multiplier section multiplying in a cascading manner the electron emitted from the photocathode, and an anode for taking out a secondary electron generated in the electron multiplier section are arranged in the enclosure. A part of the enclosure is constructed by a glass substrate having a flat part, whereas each of the electron multiplier section and anode is two-dimensionally arranged on the flat part in the glass substrate.

Photomultiplier and its manufacturing method

In a method comprising a modified region forming step of converging a laser light at a sheet-like object to be processed made of silicon so as to form a plurality of modified spots within the object along a modified region forming line tilted in a first lateral direction with respect to a thickness direction of the object and the plurality of modified spots construct a modified region, and an etching step of anisotropically etching the object after the modified region forming step so as to advance the etching selectively along the modified region and form the object with a space extending obliquely with respect to the thickness direction, the modified region forming step forms the plurality of modified spots such that the modified spots adjacent to each other at least partly overlap each other when seen in the first lateral direction.

Laser processing method

A laser processing method for forming a hole in a sheet-like object to be processed made of silicon comprises a depression forming step of forming a depression in a part corresponding to the hole on a laser light entrance surface side of the object, the depression opening to the laser light entrance surface; a modified region forming step of forming a modified region along a part corresponding to the hole in the object by converging a laser light at the object after the depression forming step; and an etching step of anisotropically etching the object after the modified region forming step so as to advance the etching selectively along the modified region and form the hole in the object; wherein the modified region forming step exposes the modified region or a fracture extending from the modified region to an inner face of the depression.

The photomultiplier tubeis provided with a casingmade of an upper frameand a lower frame, an electron multiplying parthaving dynodestoarrayed on the lower frame, a photocathode, and an anode part. Conductive layersare installed on an opposing surfaceof the upper frame. The electron multiplying partis provided with base partstoof the respective dynodestoinstalled on the side of the lower frame, and power supplying partstoconnected to the conductive layersat one end parts of the respective base partstoin a direction along the opposing surface. The base partstoare constituted in such a manner that the both end parts are joined to the opposing surface, the central part is spaced away from the opposing surface, and a cross sectional area at the one end part on the side of each of the power supplying partstois made greater than a cross sectional area at another end part.

Photomultiplier tube

The photomultiplier tubeis provided with an electron multiplying parthaving a plurality of stages of dynodestoarrayed along a direction at which electrons are multiplied on an inner surfaceof a casingand a photocathodeand an anode partinstalled so as to be spaced away form the electron multiplying partinside the casing. Each of the dynodetois provided with a plurality of columnar partstowhere secondary electron emitting surfacestoare formed, thereby forming electron multiplying channels C between adjacent columnar parts. An opposing surfacewhich opposes a columnar partwhich is a previous stage at a columnar partwhich is a subsequent stage is formed in such a manner that both end partsin a direction along the inner surfaceof the opposing surfaceproject to the first end side from a sitewhich opposes the end part of the second end side on the secondary electron emitting surfaceof the columnar part

Photomultiplier tube having a plurality of stages of dynodes with recessed surfaces

The photomultiplier tubeis provided with an upper frameand a lower framewhich are arranged so as to oppose each other, with the respective opposing surfacesmade with an insulating material, a side wall partwhich constitutes a casing together with the frames, a plurality of stages of electron multiplying partswhich are arrayed so as to be spaced away sequentially from a first end side to a second end side on the opposing surfaceof the lower frame, a photocathodewhich is installed on the first end side so as to be spaced away from the electron multiplying parts, converting incident light from outside to photoelectrons, an anode partwhich is installed on the second end side so as to be spaced away from the electron multiplying partsto take out electrons multiplied by the electron multiplying partsas a signal, and a wall-like electrodewhich is arranged so as to enclose the photocathodewhen viewed from a direction directly opposite to an opposing surfaceand having a notched partat a site opposing the electron multiplying partson the second end side.

The present invention relates to a photomultiplier that realizes a significant improvement of response time characteristics by a structure enabling mass production. The photomultiplier comprises a sealed container, and, in the sealed container, a photocathode, an electron multiplier section, and an anode are respectively disposed. The electron multiplier section includes multiple stages of dynode units, and each of the multiple stages of dynode units is fixed with one end of the associated dynode pin while being electrically connected thereto. In particular, the dynode pin, whose one ends are fixed to the multiple stages of dynode units, are held within an effective region of the electron multiplier section contributing to secondary electron multiplication, when the electron multiplier section is viewed from the photocathode side. By this configuration, a focusing distance from the photocathode to a first stage dynode unit can be shortened effectively and the effective region of the electron multiplier section can be enlarged to effectively reduce variations in transit time of photoelectrons propagating from the photocathode to the first stage dynode unit.

Photomultiplier

Electrons are prevented from being made incident onto an insulation part of a casing between dynodes to improve a withstand voltage. The photomultiplier tubeis a photomultiplier tube which is provided with substratesarranged so as to oppose each other, with the respective opposing surfacesmade with an insulating material, a substrateconstituting a casing together with the substrates, dynodestoarrayed on an opposing surfaceon the substrateso as to be spaced away sequentially from a first end side to a second end side, a photocathodeinstalled so as to be spaced away from the dynodeto the first end side, and an anode partinstalled so as to be spaced away from the dynodeto the second end side, in which the opposing surfaceof the substrateis formed so as to cover the dynodesto, and a plurality of conductive layerstoset equal in potential to dynodestowhich are electrically independent from each other are installed at sites opposing individually the dynodestoon the opposing surface

The present invention relates to a photomultiplier having a fine configuration capable of realizing stable detection accuracy. The photomultiplier has a housing whose inside is maintained vacuum, and a photocathode, an electron-multiplier section, and an anode are disposed in the housing. In particular, one or more control electrodes disposed in an internal space of the housing which surrounds the electron-multiplier section and the anode are electrically connected via one or more connection parts extending from an electron emission terminal of the electron-multiplier section. In this configuration, due to a voltage, instead of the applying between an electron entrance terminal and the electron emission terminal of the electron-multiplier section, being applied between the electron entrance terminal and the control electrodes, an electric potential gradient which is increased gradually from the photocathode side toward the anode side is formed in the electron-multiplier section, and a sufficient electric potential difference is provided between the electron emission terminal of the electron-multiplier section and the anode, which makes it possible to obtain stable detection accuracy.

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Hamamatsu, Japan

Hiroyuki Kyushima