Pioneer Electronic Corporation

Pioneer Video Corporation

Hiroyuki Kosaka

Kazumi Kuriyama

Satoru Fukuoka

Kazuhiko Nagata

Kazunori Ohmori

Goroku Kitta

A spin-coating device comprises; a turntable for concentrically supporting a substrate; a spindle motor for rotating the turntable about a central axis thereof and connected via a rotating shaft thereto; a supply mechanism for feeding and dripping a fluid coating material onto the substrate; and a holding mechanism for maintaining that the central axis of rotation of the turntable carrying the substrate is placed to be inclined at a predetermined angle with respect to a gravitational direction while the fluid coating material is dripped onto the rotating substrate.

Spin-coating device

A photo-resist layer of positive type, which is formed by a predetermined thickness on a disc substrate and which is exposed by a light beam modulated in accordance with record information to produce an optical record medium comprising the photo-resist layer and the disc substrate, is developed by the developing method. The developing method includes the steps of: firstly developing the exposed photo-resist layer by alkaline developing solution which has a normality of 0.17 to 0.19N for a first time period such that the photo-resist layer be incompletely developed to a predetermined depth from a surface of the exposed photo-resist layer; firstly washing the firstly developed photo-resist layer to stop the firstly developing step, and firstly drying the firstly washed photo-resist layer; secondly developing the firstly dried photo-resist layer by the alkaline developing solution for a second time period which is longer than the first time period such that the photo-resist layer be completely developed to a pit depth; and secondly washing the secondly developed photo-resist layer to stop the secondly developing step, and drying the secondly washed photo-resist layer to produce the optical record medium recorded with the record information as a developed pit pattern.

Developing method and developing apparatus for optical record medium

Growing community of inventors

Yamanashi, Japan

Hiroyuki Kosaka