Canon Kabushiki Kaisha

Hiroyuki Kondo

Craig William Cone

Antoine Dellinger

Steven C Shackleton

Roger R Wenzel

Jason Battin

Qi Ni

A method of cleaning a fluid dispenser for dispensing a material during non-contact maintenance of the fluid dispenser. The fluid dispenser including a plurality of nozzles disposed on a faceplate. The method including applying a suction force onto a surface of the faceplate using a suction apparatus, the suction apparatus being translated from one end of the faceplate to an opposite end of the faceplate such that a portion of nozzles from the plurality of nozzles are exposed to the suction force. The method continues by vibrating a menisci of the portion of nozzles that are exposed to the suction force to remove at least a portion of the material accumulated on the faceplate.

Method of cleaning fluid dispenser by applying suction force and vibrating meniscus

A method of cleaning a dispenser including a faceplate, comprises emitting light over the surface of the faceplate across the width of the faceplate, measuring an intensity of the light at a plurality of points on the surface of the faceplate after the light has passed over the width, determining, based on the measured light intensity, whether an amount of accumulated formable material on the faceplate is greater than a predetermined value, and in a case that the amount of accumulated formable material is greater than a predetermined value, imparting a suction force on the surface of the faceplate using the vacuum at a distance from the faceplate to remove at least a portion of the accumulated formable material from the surface of the faceplate.

Nano-fabrication system with cleaning system for cleaning a faceplate of a dispenser and method of cleaning the faceplate

An imprint apparatus performs an imprint process for forming a pattern of a cured product of an imprint material on a substrate by using a mold. The apparatus includes a substrate holder configured to hold the substrate, a substrate deformation mechanism configured to deform the substrate so the substrate will have a convex shape toward the mold in a state in which the substrate is held by the substrate holder, and a controller configured to control the deformation of the substrate by the substrate deformation mechanism in accordance with orientation information related to a crystal orientation of the substrate and a target shot region on which the imprint process is to be performed among a plurality of shot regions on the substrate.

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Utsunomiya, Japan

Hiroyuki Kondo