Rigaku Corporation

Hiroyuki Kawakami

Tatsuya Inoue

Hiroaki Kita

Motoyuki Yamagami

Provided is an X-ray fluorescence spectrometer that achieves a uniform state on a back side of a thin sheet-shaped sample so as to prevent a difference in a measurement condition depending on a measurement position. The X-ray fluorescence spectrometer includes: a sample stage a background correction cover, which is arranged adjacent to an outer side of the sample stage so that a surface of the background correction cover is substantially flush with a surface of the sample stage; and a moving mechanism. The moving mechanism moves the background correction cover based on movement of the sample stage and, when the sample stage is absent on a back side of the sample at a measurement position, moves the background correction cover so that the background correction cover is located on the back side of the sample at the measurement position.

X-ray fluorescence spectrometer

An X-ray fluorescence analyzing system includes: a cassette () in which a substrate () is housed; a vapor phase decomposing device () for dissolving and then drying a measurement object () on a sample substrate surface () to be held thereon; at least one measurement substrate (); a sample recovering device () for dripping and drying a recovery liquid (), which has recovered the measurement object () from the sample substrate (), onto a predetermined dripping position on a measurement substrate surface () to hold the recovery liquid () thereon; an X-ray fluorescence spectrometer (); a conveying device () for conveying the substrate (); and a control device () for controlling the devices (). The recovery liquids () of the measurement objects () from a plurality of the sample substrates () are dripped and dried on the single measurement substrate surface () to be measured.

X-ray fluorescence analyzing system

An analyzing apparatus of the present invention includes a cassette unit () for generating a cassette identification signal identifying a type of a cassette (), a sample holder () having an insertion hole () and a ring shaped pedestal (), a transport section () for transporting the sample (S), a sample holder identifying section () for generating a sample holder identification signal identifying the type of the sample holder appropriate to the diameter of the sample to be placed, and a determining section () for determining, based on the cassette identification signal and the sample holder identification signal, whether or not the diameter of the sample to be accommodated in the cassette () and the diameter of the sample to be placed on the pedestal of the sample holder () match with each other.

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Takatsuki, Japan

Hiroyuki Kawakami