Ngk Insulators, Inc.

Hiroyuki Iwasaki

Masaaki Masuda

Tadaaki Matsuhisa

Syuji Sakai

Yuji Katsuda

Shigeki Kato

Tsuneaki Ohashi

Shigenori Ito

Hirotake Yamada

Masashi Harada

A halogen gas plasma-resistant member to be exposed to a halogen gas plasma, includes a main body of said member, and a corrosion-resistant film formed at least a surface of said main body, wherein a peeling resistance of the corrosive film to said main body is not less than 15 MPa.

Halogen gas plasma-resistive members and method for producing the same, laminates, and corrosion-resistant members

A mold for forming a molded body from a slurry including an impermeable mold part having a cavity for retaining the slurry and a permeable mold provided on a side of a molding surface with a membrane filter. A method of forming a molded body from a slurry includes steps of introducing the slurry into a cavity of a mold including an impermeable mold part and a permeable mold part provided on a side of a molding surface with a membrane filter, and removing a solvent medium of the slurry through the permeable mold part. A pressure casting molding method of forming a high dense ceramic molded body by pouring a ceramic slurry into a mold through a pouring portion thereof and pressurizing the ceramic slurry on a side of the pouring portion while removing a solvent medium of the slurry on the other side of the mold through a permeable mold part of the mold. The method includes steps of filling a hydrophobic pressurizing medium in the pouring portion after pouring the ceramic slurry into the mold for pressurizing the ceramic slurry through the hydrophobic pressuring medium, and/or removing the solvent medium and/or removing the solvent medium through a membrane filter provided on a side of a molding surface of said permeable mold part of the mold.

Method of forming molded body

A ceramics shaped article having a large wall-thickness and having a complicated shape, which can not be monolithically produced by a conventional molding, can be easily produced through a monolithical molding by the use of a ceramic batch containing water as a plasticizing medium and a small amount of an organic binder as a plasticizer. The ceramic shaped article can be fired into a ceramic sintered article in high dimensional accuracy and yield.

Method for producing ceramics sintered article and molding method and

Mold for forming molded body

A shaping mole including a container section which is to receive a water-containing ceramic composition and which is defined by a non-permeable mold or a combination of a non-permeable mold and a permeable mold. A part of a shaping surface of the non-permeable mold is made of a material having a contact angle of not less than 80.degree. for water. A process for shaping ceramic articles by using such a mold is also disclosed, which including, the steps of preparing a water-containing ceramic composition comprising a ceramic powder containing a sintering assistant, a shaping assistant, and water, pouring the water-containing ceramic material into the shaping mold, pressing the ceramic composition, and releasing the molding from the mold. The water-containing ceramic material is prepared by using at least a gelatinizable water-soluble binder as the shaping assistant.

Shaping molds and shaping of ceramic bodies by using such shaping molds

A process for producing silicon nitride ceramic articles is disclosed, which includes the steps of preparing a mixed powder of silicon nitride and a sintering aid, shaping the mixed powder, sintering the shaped body, machining the sintered body in a desired shape, and then heating the machined sintered body in a temperature range from 550.degree. C. to 900.degree. C. in an oxidizing atmosphere. Alternatively, after the sintering, the sintered body is heated in a temperature range from 950.degree. C. to 1,400.degree. C. to crystallize an Si.sub.3 N.sub.4 grain boundary phase, the crystallized sintered body is machined into a desired shape, and the machined body is heated in a temperature range from 550.degree. C. to 900.degree. C. in an oxidizing atmosphere. Thereby, silicon nitride ceramic articles having high strength at room temperature can be obtained.

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Nagoya, Japan

Hiroyuki Iwasaki