Headway Technologies, Incorporated

Sae Magnetics (h.k.) Limited

Tdk Corporation

Hitachi Metals, Ltd.

Sony Corporation

Techno Polymer Company Limited

Headway Technology, Inc.

Hiroyuki Itoh

Yoshitaka Sasaki

Shigeki Tanemura

Hironori Araki

Kazuo Ishizaki

Takehiro Kamigama

Tatsushi Shimizu

Takehiro Horinaka

Dong-Hong Li

Tatsuya Shimizu

Lijie Guan

Tetsuo Endo

Joseph Francis Smyth

Ichiro Katagiri

Yasushi Kishimoto

Toshiro Hayashi

Akinori Koyama

Naomasa Sato

Yuichi Nanae

Hideto Horiguchi

Shuichi Watanabe

Hiroyoshi Hayashi

Kenji Hayashi

Erhard Theodor Schreck

Po-Kang Wang

Moris Musa Dovek

Ryuji Fujii

Hiroshi Hozoji

Koji Ichikawa

Kowang Liu

Yuta Sugiyama

Hiroaki Miyazaki

Shigeru Takeda

Masahiko Noro

Hisayuki Imamura

Yaw-Shing Tang

Hiroyuki Nagatomo

Keigo Higaki

Shinichirou Takeuchi

Shinroh Itoh

Manabu Yumoto

Youichi Takahashi

Kouji Ichikawa

Tatsuo Joji

Yoshifumi Ohtsu

Tadaaki Hourai

Tsuyoshi Fukuta

Osamu Yamada

The present invention focuses on a silicon nitride substrate having high mechanical strength, high thermal conductivity and the like, and takes advantage of such properties to provide: a ceramic substrate capable of providing improvement in a bonding property between a silicon nitride substrate and a ceramic layer which uses a dielectric ceramic material capable of being simultaneously sintered with a low-resistance conductive material such as a low-melting metal (Ag or Cu); and a method for producing the ceramic substrate. The ceramic substrate of the present invention is obtained by stacking and bonding a silicon nitride substrate and a ceramic layer composed of a dielectric ceramic material, wherein: the dielectric ceramic material contains Mg, Al, and Si as main ingredients, and Bi or B as an accessory ingredient; and the ceramic layer includes a region with a high Si element concentration at a bonding interface with the silicon nitride substrate.

Ceramic substrate and production method for same

In order to address the problem in that, by increasing the gate resistance of a power semiconductor element, while variation of switching time can be controlled, loss due to the gate resistance becomes larger and power efficiency for the entire system is lowered, the present invention provides an insulating substrate capable of uniformizing switching speeds of circuit elements while suppressing influence on power efficiency of the circuit elements. In the insulating substrate according to the present invention, part of a wiring layer is formed as a control signal circuit layer, and part of the control signal circuit layer is formed as a resistance layer that increases input resistance when the circuit element receives a control signal.

Insulating substrate and semiconductor device using same

A method of manufacturing a magnetic head includes the steps of: forming a pole-layer-encasing layer having a pole-layer-encasing section; and forming a pole layer in the pole-layer-encasing section. The pole layer includes a first layer, and a second layer formed thereon. The step of forming the pole layer includes the steps of: forming an initial first layer by physical vapor deposition; etching the surface of the initial first layer by dry etching so that the initial first layer becomes the first layer; and forming the second layer on the first layer.

Method of manufacturing a magnetic head for perpendicular magnetic recording

A magnetic head includes a pole layer accommodated in a groove. The pole layer has a track width defining portion and a wide portion. The pole layer includes a plurality of magnetic films stacked. At least one of the plurality of magnetic films includes a first portion included in the track width defining portion, a second portion included in the wide portion, and a third portion coupling the first and second portions to each other. In a cross section passing through the center of the pole layer taken in the track width direction, the second portion is smaller than the first portion in thickness and the top surface of the third portion is inclined with respect to a direction perpendicular to a medium facing surface.

Magnetic head for perpendicular magnetic recording having a pole layer including a plurality of stacked magnetic films

A magnetic head comprises a pole layer, a first coil, a second coil, and a shield. The shield incorporates: a first portion located backward of the pole layer along the direction of travel of a recording medium; a second portion located forward of the pole layer along the direction of travel of the recording medium; and two coupling portions. The first portion has an end face located in a medium facing surface. The two coupling portions couple the first and second portions to each other without touching the pole layer. Part of the first coil passes through a space surrounded by the pole layer and the first portion. Part of the second coil passes through a space surrounded by the pole layer and the second portion.

Magnetic head for perpendicular magnetic recording and method of manufacturing same

A method of forming a magnetic head comprises the steps of: selectively exposing through the use of a photomask a photoresist layer unpatterned; forming a pattern for forming a pole layer by developing the photoresist layer after the exposure; and forming the pole layer through the use of the pattern. The photomask includes first to third regions. The first region has such a perimeter that a projection image thereof is shaped along a perimeter of an ideal shape of the top surface of the pole layer. The second region touches the perimeter of the first region, and is located outside the first region. The third region is located inside the first region without touching the perimeter of the first region. The third region suppresses deviation of the pole layer from its desired shape which may be caused by the effect of light reflected while the photoresist layer is exposed.

Method of manufacturing magnetic head having a patterned pole layer and method of forming a patterned layer

A magnetic layer for writing incorporates: a pole layer having an end face located in a medium facing surface and a lower yoke layer. A first magnetic layer for flux concentration is connected to the lower yoke layer at a location away from the medium facing surface, and passes a magnetic flux corresponding to a magnetic field generated by a first coil. A second magnetic layer for flux concentration is connected to the pole layer at a location away from the medium facing surface, and passes a magnetic flux corresponding to a magnetic field generated by a second coil. A nonmagnetic layer is disposed between the pole layer and the lower yoke layer. The lower yoke layer is connected to the pole layer at a location closer to the medium facing surface than the nonmagnetic layer.

Magnetic head for perpendicular magnetic recording

A magnetic head includes a pole layer, and an encasing layer having a groove that accommodates the pole layer. A manufacturing method for the magnetic head includes the steps of forming a nonmagnetic layer that will later undergo formation of the groove therein and will thereby become the encasing layer; forming the groove in the nonmagnetic layer so that the nonmagnetic layer becomes the encasing layer; and forming the pole layer such that the pole layer is accommodated in the groove of the encasing layer. The nonmagnetic layer is formed of AlO. The step of forming the groove in the nonmagnetic layer includes the step of taper-etching the nonmagnetic layer by reactive ion etching with an etching gas containing at least BCland Namong BCl, Cland N.

Method of manufacturing magnetic head for perpendicular magnetic recording

A magnetic layer for writing incorporates: a pole layer having an end face located in a medium facing surface; and an upper yoke layer. A first magnetic layer for flux concentration is connected to the pole layer at a location away from the medium facing surface, and passes a magnetic flux corresponding to a magnetic field generated by a first coil. A second magnetic layer for flux concentration is connected to the upper yoke layer at a location away from the medium facing surface, and passes a magnetic flux corresponding to a magnetic field generated by a second coil. A nonmagnetic layer is disposed between the pole layer and the upper yoke layer. The upper yoke layer is connected to the pole layer at a location closer to the medium facing surface than the nonmagnetic layer.

A method of manufacturing the magnetic head includes the steps of: forming the pole-layer-encasing layer; forming an initial nonmagnetic layer in the groove of the pole-layer-encasing layer by physical vapor deposition, the initial nonmagnetic layer being intended to become the nonmagnetic layer later by undergoing etching of a surface thereof; etching the surface of the initial nonmagnetic layer by dry etching so that the initial nonmagnetic layer becomes the nonmagnetic layer; and forming the pole layer in the pole-layer-encasing section formed by the nonmagnetic layer.

A method of manufacturing magnetic heads comprises the step of: fabricating a magnetic head substructure by forming a plurality of components of the magnetic heads on a single substrate, wherein a plurality of rows of pre-head portions that will be the respective magnetic heads later are aligned in the substructure; and fabricating the magnetic heads by separating the pre-head portions from one another through cutting the substructure. In the step of fabricating the substructure, a plurality of indicators are formed, each of the indicators serving as a reference for indicating the location of a region ABS in which the medium facing surfaces of the magnetic heads are to be formed.

Method of manufacturing magnetic head, and magnetic head sub-structure

A thin film magnetic head has a configuration in which a main magnetic pole film having a magnetic pole end portion on a medium opposing surface (ABS) side facing a magnetic disk, a write shield film facing the magnetic pole end portion so as to form a recording gap film on the medium opposing surface side, and a thin film coil wound around at least a part of the write shield film are laminated. Further, the thin film magnetic head has an upper yoke magnetic pole film whose size is larger than that of the main magnetic pole film at a part more distant from the ABS than the recording gap film, and this upper yoke magnetic pole film is bonded to the side of the main magnetic pole film close to the thin film coil. In the upper yoke magnetic pole film, an end portion on the ABS side is retracted in a direction apart from the ABS in accordance with an increase in film thickness which is measured from the surface of the main magnetic pole film.

Thin film magnetic head and manufacturing method thereof

An encasing section includes an encasing layer having an encasing groove, and a nonmagnetic film disposed in the encasing groove at a position between the encasing layer and a pole layer. The pole layer includes a track width defining portion and a wide portion. The track width defining portion has a first side surface and a second side surface. The wide portion has a third side surface and a fourth side surface. The encasing layer has a first wall surface and a second wall surface. The distance between the third side surface and the first wall surface is smaller than the distance between the first side surface and the first wall surface. The distance between the fourth side surface and the second wall surface is smaller than the distance between the second side surface and the second wall surface.

A pole layer has an end located in a medium facing surface, the end having: a first side close to a substrate; a second side located opposite to the first side; a third side connecting an end of the first side to an end of the second side; and a fourth side connecting the other end of the first side to the other end of the second side. The second side defines a track width. The end of the pole layer located in the medium facing surface has a width that decreases toward the first side. The pole layer is disposed in a groove of a pole-layer-encasing layer made of a nonmagnetic insulating material, with a nonmagnetic conductive film provided between the encasing layer and the pole layer. The pole layer incorporates: a first layer located closer to the surface of the groove; and a second layer located farther from the surface of the groove.

A magnetic layer for writing incorporates: a pole layer having an end face located in a medium facing surface; and an upper yoke layer. A first magnetic layer for flux concentration is connected to the pole layer at a location away from the medium facing surface, and allows a magnetic flux corresponding to a magnetic field generated by a first coil to pass. A second magnetic layer for flux concentration is connected to the upper yoke layer at a location away from the medium facing surface, and allows a magnetic flux corresponding to a magnetic field generated by a second coil to pass. When seen in the direction orthogonal to the interface between the second magnetic layer and the upper yoke layer, this interface is disposed at a location that does not coincide with the interface between the first magnetic layer and the pole layer.

Growing community of inventors

Milpitas, CA, United States of America

Hiroyuki Itoh