Ckd Corporation

Utsunomiya University

Hiroyuki Ishigaki

Takahiro Mamiya

Tsuyoshi Ohyama

Norihiko Sakaida

Nobuyuki Umemura

Ikuo Futamura

Tomoru Okada

Yoshio Hayasaki

A three-dimensional measurement device includes: an optical system including an optical device that splits an incident light, irradiates a measurement object with a measurement light, irradiates a reference plane with a reference light, and combines at least part of the reflected measurement light with at least part of the reflected reference light to emit a combined light; a first light emitter that emits a first light that has a first wavelength; a second light emitter that emits a second light that has a second wavelength; a first imaging device that takes an image of an output light output from the optical device in which the first light enters; a second imaging device that takes an image of an output light output from the optical device in which the second light enters; and a control device that executes three-dimensional measurement of the measurement object.

Three-dimensional measurement device

A three-dimensional measurement device includes: a light emitter; an optical system that splits an incident light, irradiates a measurement object with an object light and irradiates a reference plane with a reference light, and recombines the object and reference lights and emits a combined light; an imaging device that takes an image of a light emitted from the optical system; a storage device that stores transmission axis absolute angle data each obtained by a previous actual measurement of an absolute angle of a transmission axis of each polarizer; and a control device that calculates a phase difference between the reference and object lights based on luminance data of each pixel in luminance image data and the transmission axis absolute angle data of each polarizer corresponding to the pixel, and measures a height of the measurement object at the measurement position.

A three-dimensional measurement device includes: an optical system that splits incident light into two lights, radiates one of the two lights as measurement light to a measured object and the other of the two lights as reference light to a reference surface, and recombines the two lights into combined light to emit the combined light; a light emitter that emits predetermined light entering the predetermined optical system; an imaging system that takes an image of output light emitted from the optical system; and an image processor that performs three-dimensional measurement of a predetermined measurement area of the measured object based on an interference fringe image obtained by the imaging system. The image processor obtains intensity image data at a predetermined position along an optical axis direction at each coordinate position in the measurement area by reconstruction based on an interference fringe image of the measurement area.

A three-dimensional measurement device includes: an optical system that splits incident light into two lights and radiates lights to a measurement object and to a reference surface, and recombines the two lights to emit combined light; a first irradiator that emits first light including first polarized light and entering a first surface; a second irradiator that emits second light including second polarized light and entering a second surface; a first imaging system to which the first output light enters wherein the first output light is emitted from the first surface when the first light enters the first surface; a second imaging system to which the second output light enters wherein the second output light is emitted from the second surface when the second light enters the second surface; and an image processor that performs three-dimensional measurement based on interference fringe images obtained by the first and second imaging systems.

A three-dimensional measurement device includes: an optical system that splits incident light into two lights, radiates one of the two lights as measurement light to a measurement object and the other as reference light to a reference surface, and recombines the two lights to emit combined light; a first irradiation unit that emits first light entering the optical system; a second irradiation unit that emits second light entering the optical system; a first imaging unit into which output light that is obtained from the first light and is emitted from the optical system enters; a second imaging unit into which output light that is obtained from the second light and is emitted from the optical system enters; and an image processor that executes three-dimensional measurement of the measurement object, based on interference fringe images taken by the first imaging unit and the second imaging unit.

A three-dimensional measurement device includes an optical system that: splits an incident light into two lights; radiates one light to a measurement object and the other light to a reference surface; and emits the combined light; a first irradiator that emits a first light that comprises a polarized light of a first wavelength and enters a first element of the optical system; a second irradiator that emits a second light that comprises a polarized light of a second wavelength and enters a second element of the optical system; a first camera that takes an image of the first light emitted from the second element when the first light enters the first element; a second camera that takes an image of the second light emitted from the first element when the second light enters the second element; and an image processor that performs measurement based on the images.

A measurement apparatus includes an illumination device irradiating an object with a first and a second pattern, a camera taking image data of the object, a motor displacing the object, and a processor measuring the object, obtaining a first value of the object based on a first number of image data taken with the first pattern at a first number of phases at a first position, obtaining a gain and/or offset based on the first number of image data, obtaining a second value of the object based on the gain and/or offset and a second number of image data taken with the second pattern at a second number of phases at a second position, obtaining height data of the object based on the first and the second value, and obtaining the second value with an average of the gain and/or offset of pixels adjacent to each pixel.

Three-dimensional measurement apparatus

A measurement device includes: an optical system that splits incident light into two lights to emit one light as measurement light to a measurement object and the other light as reference light to a reference surface, and recombines the two lights to emit combined light; a light emitter that emits light entering the optical system; an imaging system that takes an image of output light emitted from the optical system; and a processor that executes measurement with regard to a predetermined measurement area of the measurement object, based on an interference fringe image taken by the imaging system, wherein the processor: obtains complex amplitude data at a predetermined position in an optical axis direction at predetermined intervals in at least a predetermined range in the optical axis direction, with regard to a specific area set in advance in the measurement area based on the interference fringe image.

Measurement device

A three-dimensional measurement device includes a light source and grid that irradiate a measurement object; a luminance controller that changes luminance levels of the light; a phase controller that changes phase levels of the light pattern; a camera that takes an image of the measurement object; and a processor that three-dimensionally measures a first measurement object area based on different image data taken by radiating a first light pattern in different phases; determines a relationship between a gain and offset determined according to an imaging condition based on the different image data; and three-dimensionally measures a second measurement object area based on two different image data taken by radiating a second light pattern in two different phases by using a gain and offset regarding each pixel determined according to a luminance value of each pixel in the two different image data and the determined relationship.

A three-dimensional measurement device includes: a first irradiator that radiates a first light pattern from a first position toward an object; a first grid controller that controls a first grid to change phases of the first light pattern; a second irradiator that radiates a second light pattern from a second position toward the object; a second grid controller that controls the second grid to change phases of the second light pattern; a camera that takes an image of reflected light from the object; and a processor that: performs one of a first imaging process of imaging processes performed by radiation of the first light pattern and a second imaging process of imaging processes performed by radiation of the second light pattern; and subsequently performs the other imaging process without waiting for completion of the transfer or changeover of the first or the second grid involved in the one imaging process.

A three-dimensional measuring device includes an extraction unit that extracts an image data set with a brightness value of each of pixels in image data within an effective range from among a plurality of image data sets at each of coordinate positions of an object to be measured, and a three-dimensional measurement unit that performs three-dimensional measurement relating to each of the coordinate positions of the object to be measured based on the extracted image data set. The extraction unit extracts the image data set imaged under a pattern light with the highest irradiation brightness among a plurality of types of pattern lights when there is a plurality of sets of the image data sets with the brightness value of each of the pixels in the image data within the effective range from among the plurality of the image data sets.

Three-dimensional measuring device

A board inspection apparatus includes an irradiation unit, an imaging unit, and an image processing unit. The image processing unit includes a three-dimensional measurement unit configured to perform three-dimensional measurement of the surfaces of the solder and the resist film by a certain three-dimensional measurement method based on the image data, a virtual standard surface setting unit configured to set a virtual standard surface corresponding to a contacting surface of a certain component mounted in a certain area of the printed board, a protrusion amount calculation unit configured to calculate a protrusion amount from the virtual standard surface for each solder printed and formed in the certain area, and a determination unit configured to determine whether the printed state of the solder passes or fails based on each of the protrusion amounts of the solder.

Board inspection apparatus

A device for measuring three dimensional shape includes a first irradiation unit, a first grating control unit, a second irradiation unit, a second grating control unit, an imaging unit, and an image processing unit. After performance of a first imaging operation as imaging processing of a single operation among a multiplicity of imaging operations performed by irradiation of said first light pattern of multiply varied phases, a second imaging operation is performed as imaging processing of a single operation among a multiplicity of imaging operations performed by irradiation of said second light pattern of multiply varied phases. After completion of the first imaging operation and the second imaging operation, shifting or switching operation of the first grating and the second grating is performed simultaneously.

Device for measuring three dimensional shape

A device for measuring three dimensional shape is configured to perform one of a first imaging operation as imaging processing of a single operation among a multiplicity of imaging operations performed by irradiation of a first light pattern of multiply varied phases, and a second imaging operation as imaging processing of a single operation among a multiplicity of imaging operations performed by irradiation of a second light pattern of multiply varied phases. The device is configured to, simultaneous with completion of the first or second imaging operation, start shifting or switching operation of said first grating or a second grating relating to said first imaging operation. The device is configured to, without waiting for completion of the shifting or switching operation, perform the other imaging operation from among the first and second imaging operations.

A device for measuring three dimensional shape includes a first height data acquisition unit for acquiring a height data specified from measurement values according to a multiplicity of light patterns related to an entirely irradiated region irradiated by all of the multiplicity of light patterns, and for using an acquired specified height data as a height data for the entirely irradiated region; a supplemental data acquisition unit for acquiring, based on the height data for the entirely irradiated region, a supplemental data relating to a partially irradiated region that is irradiated by only part of the multiplicity of light patterns; and a second height acquisition unit for specifying a fringe order of the measurement values for the partially irradiated region based on the supplemental data, and for acquiring as height data for the partially irradiated region a height data corresponding to the measurement values of the specified fringe order.

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Aichi, Japan

Hiroyuki Ishigaki