Origin Electric Company, Limited

Hiroyuki Ikoshi

Toshio Kobayashi

Tetsuya Matsumoto

Kazuo Sakai

Kiyomi Watanabe

Tadashi Masuda

Kiyoshi Komatsu

A sputtering apparatus is provided with a DC power supply, an inverterthat converts DC voltage to AC voltage, a matching circuitthat transforms the AC voltage, a rectifierthat converts the transformed AC voltage to direct current, and a sputtering load. The matching circuithas a transformerthat transforms AC voltage from the inverter, inductance L provided in series with at least one of the primary windingand secondary winding, and a condenser C provided in parallel with at least one of the primary windingand secondary windingthrough inductance L.

Sputtering apparatus

This discharge power supply apparatus is for supplying a D.C. voltage to a discharge loadand discharging the same. The discharge power supply apparatus includes an inverter circuitthat converts D.C. voltage to A.C. voltage; a transformerhaving a primary windingto which the A.C. voltage output by the inverter circuitis supplied and a secondary winding; a full-wave rectifier circuitthat has a plurality of diodesA toD and rectifies the A.C. voltage generated by the secondary winding; and a trigger capacitorconnected in parallel to a part of the diodes of the full-wave rectifier circuit

Discharge power supply apparatus

Growing community of inventors

Tokyo, Japan

Hiroyuki Ikoshi